AlGaN基紫外分布式布拉格反射镜的结构优化 
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Structure Optimization of AlGaN-Based Ultraviolet Distributed Bragg Reflector
南京信息工程大学物理与光电工程学院, 江苏 南京 210044
图 & 表
图 1. DBR结构示意图
Fig. 1. Schematic of DBR structure
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图 2. 30周期的Al0.3Ga0.7N/AlN DBR结构的理论反射光谱和实测结果
Fig. 2. Measured and simulated reflection spectrometry of Al0.3Ga0.7N/AlN DBR with 30 pairs
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图 3. 微调Al0.3Ga0.7N厚度后对应的反射光谱模拟图
Fig. 3. Simulated DBR reflection spectra with changed and unchanged thickness of AlGaN
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图 4. 30周期的AlN/Al0.3Ga0.7N DBR结构与Al0.3Ga0.7N/AlN DBR 结构的反射光谱对比图
Fig. 4. Reflection spectrometry of AlN/Al0.3Ga0.7N DBR and Al0.3Ga0.7N/AlN DBR with 30 pairs
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表 1相关系数值与相关程度的关系
Table1. Relationship of correlation coefficient and correlation degree
| Correlation degree |
|---|
| 1.0-0.9 | Very strong | | 0.9-0.7 | Strong | | 0.7-0.5 | Weak | | <0.5 | Very weak |
|
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表 2分层厚度(AlGaN)与中心波长、最高反射率的相关系数
Table2. Correlation coefficients between AlGaN's thickness and center wavelength or reflectivity
| Iterm | AlGaN'sthickness | Centerwavelength | Reflectivity |
|---|
| AlGaN'sthickness | 1 | | | | Centerwavelength | 0.915042496 | 1 | | | Reflectivity | -0.895691451 | -0.877 521 154 | 1 |
|
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表 3DBR周期内膜层顺序与反射率的相关系数
Table3. Correlation coefficient of the layer's order in the DBR period and reflectivity
| Iterm | Wavelength | Changed | Original |
|---|
| Wavelength | 1 | | | | Changed | -0.662722357 | 1 | | | Original | -0.662199086 | 0.903308 | 1 |
|
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张李骊, 刘战辉, 钟霞. AlGaN基紫外分布式布拉格反射镜的结构优化[J]. 激光与光电子学进展, 2018, 55(6): 062203. Lili Zhang, Zhanhui Liu, Xia Zhong. Structure Optimization of AlGaN-Based Ultraviolet Distributed Bragg Reflector[J]. Laser & Optoelectronics Progress, 2018, 55(6): 062203.
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