Chinese Optics Letters, 2005, 3 (5): 05275, Published Online: Jun. 6, 2006
Fabrication of silica-on-silicon planar lightwave circuits by PECVD and ECR
Basic Information
DOI: | -- |
中图分类号: | -- |
栏目: | integrated optics |
项目基金: | -- |
收稿日期: | Nov. 22, 2004 |
修改稿日期: | -- |
网络出版日期: | Jun. 6, 2006 |
通讯作者: | Libing Zhou (libzhou@yahoo.com) |
备注: | -- |
Libing Zhou, Fengguang Luo, Mingcui Cao. Fabrication of silica-on-silicon planar lightwave circuits by PECVD and ECR[J]. Chinese Optics Letters, 2005, 3(5): 05275.