Fabrication of silica-on-silicon planar lightwave circuits by PECVD and ECR
Libing Zhou, Fengguang Luo, Mingcui Cao. Fabrication of silica-on-silicon planar lightwave circuits by PECVD and ECR[J]. Chinese Optics Letters, 2005, 3(5): 05275.
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Libing Zhou, Fengguang Luo, Mingcui Cao. Fabrication of silica-on-silicon planar lightwave circuits by PECVD and ECR[J]. Chinese Optics Letters, 2005, 3(5): 05275.