光学学报, 1990, 10 (3): 234, 网络出版: 2007-11-12
激光热解气相沉积中基片的表面温度
Surface temperature of substrate in laser-induced pyrolytic vapor deposition
摘要
本文通过理论计算和实验测量了CW CO2激光辐照下石英基片的表面温度分布及其上升过程,并用此结果分析了CW CO2激光热解W(CO)6在石英片上沉积大面积钨膜的实验.
Abstract
The distribution of surface temperature and temperature rising of a thin quartz substrate illuminated by a CW CO2 laser was calculated theoretically and measured experimentally. The results were used to analyze the experiments of CW CO2 laser induced pyrolysis of W(CO)6 for depositing large area tungsten films on quartz substrate.
陆雪标, 陈持平, 张杰, 邱明新. 激光热解气相沉积中基片的表面温度[J]. 光学学报, 1990, 10(3): 234. 陆雪标, 陈持平, 张杰, 邱明新. Surface temperature of substrate in laser-induced pyrolytic vapor deposition[J]. Acta Optica Sinica, 1990, 10(3): 234.
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