Micro-fabrication and hermeticity measurement of alkali-atom vapor cells based on anodic bonding

Lu Zhang; Wendong Zhang; Shougang Zhang; Shubin Yan

doi:doi:10.3788/COL201917.100201

Chinese Optics Letters, 2019, 17 (10): 100201, Published Online: Aug. 29, 2019

Micro-fabrication and hermeticity measurement of alkali-atom vapor cells based on anodic bonding Download： 1320次

Lu Zhang ¹Wendong Zhang ¹Shougang Zhang ²Shubin Yan ^1,*

Author Affiliations

¹ Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China

² Key Laboratory of Time and Frequency Primary Standards, National Time Service Center, Chinese Academy of Sciences, Xi’an 710600, China

Figures & Tables

Fig. 4. (a) and (b) SEM images of a vapor cell with different shapes. (c) Schematic of the simulated etching effect. (d) and (e) Etching depth during the etching process.

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Fig. 5. Schematic of the anodic-bonding process. (a) and (b) First anodic bonding. (c) Filled alkali-metal compounds. (d) and (e) Second anodic bonding. (f) Completed vapor cell.

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Fig. 6. Current–voltage curves during the anodic-bonding process.

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Fig. 7. (a) Image of the etched silicon wafer. (b) Image of the fabricated bonded silicon wafer.

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Fig. 8. Vapor cells of different optical cavity lengths compared with a dime: (a) 4 mm long and (b) 1 mm long.

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Fig. 9. (a) Test platform for D2 absorption spectroscopy. (b) D2 absorption spectra at different temperatures.

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Fig. 10. Helium leak rate measurement of vapor cells with different optical cavity lengths.

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Fig. 11. SEM images of the anodic-bonding surface.

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Lu Zhang, Wendong Zhang, Shougang Zhang, Shubin Yan. Micro-fabrication and hermeticity measurement of alkali-atom vapor cells based on anodic bonding[J]. Chinese Optics Letters, 2019, 17(10): 100201.

Micro-fabrication and hermeticity measurement of alkali-atom vapor cells based on anodic bonding Download： 1320次

Fig. 1. Schematic of the dual-cavity vapor cell.

Fig. 2. Schematic of the principle of anodic bonding.

Fig. 3. Schematic of the DRIE of the silicon wafer of a vapor cell.

Fig. 4. (a) and (b) SEM images of a vapor cell with different shapes. (c) Schematic of the simulated etching effect. (d) and (e) Etching depth during the etching process.

Fig. 5. Schematic of the anodic-bonding process. (a) and (b) First anodic bonding. (c) Filled alkali-metal compounds. (d) and (e) Second anodic bonding. (f) Completed vapor cell.

Fig. 6. Current–voltage curves during the anodic-bonding process.

Fig. 7. (a) Image of the etched silicon wafer. (b) Image of the fabricated bonded silicon wafer.

Fig. 8. Vapor cells of different optical cavity lengths compared with a dime: (a) 4 mm long and (b) 1 mm long.

Fig. 9. (a) Test platform for D2 absorption spectroscopy. (b) D2 absorption spectra at different temperatures.

Fig. 10. Helium leak rate measurement of vapor cells with different optical cavity lengths.

Fig. 11. SEM images of the anodic-bonding surface.

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Micro-fabrication and hermeticity measurement of alkali-atom vapor cells based on anodic bonding Download： 1320次

Fig. 1. Schematic of the dual-cavity vapor cell.

Fig. 2. Schematic of the principle of anodic bonding.

Fig. 3. Schematic of the DRIE of the silicon wafer of a vapor cell.

Fig. 4. (a) and (b) SEM images of a vapor cell with different shapes. (c) Schematic of the simulated etching effect. (d) and (e) Etching depth during the etching process.

Fig. 5. Schematic of the anodic-bonding process. (a) and (b) First anodic bonding. (c) Filled alkali-metal compounds. (d) and (e) Second anodic bonding. (f) Completed vapor cell.

Fig. 6. Current–voltage curves during the anodic-bonding process.

Fig. 7. (a) Image of the etched silicon wafer. (b) Image of the fabricated bonded silicon wafer.

Fig. 8. Vapor cells of different optical cavity lengths compared with a dime: (a) 4 mm long and (b) 1 mm long.

Fig. 9. (a) Test platform for D2 absorption spectroscopy. (b) D2 absorption spectra at different temperatures.

Fig. 10. Helium leak rate measurement of vapor cells with different optical cavity lengths.

Fig. 11. SEM images of the anodic-bonding surface.

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