强激光与粒子束, 2012, 24 (11): 2613, 网络出版: 2012-10-12
湿法和溶脱法的亚微米ZnO:Al光栅制备
Farbrication of submicron ZnO:Al gratings with wet etching and lift-off technology
基本信息
DOI: | 10.3788/hplpb20122411.2613 |
中图分类号: | O436.1 |
栏目: | |
项目基金: | 国家自然科学基金项目(10576021, 60977028);上海市重点科研基金项目(09JC1413800 |
收稿日期: | 2012-02-19 |
修改稿日期: | 2012-06-07 |
网络出版日期: | 2012-10-12 |
通讯作者: | 刘仁臣 (lrc0322@yahoo.com.cn) |
备注: | -- |
刘仁臣, 吴永刚, 夏子奂, 王振华, 唐平林, 梁钊铭. 湿法和溶脱法的亚微米ZnO:Al光栅制备[J]. 强激光与粒子束, 2012, 24(11): 2613. Liu Renchen, Wu Yonggang, Xia Zihuan, Wang Zhenhua, Tang Pinglin, Liang Zhaoming. Farbrication of submicron ZnO:Al gratings with wet etching and lift-off technology[J]. High Power Laser and Particle Beams, 2012, 24(11): 2613.