湿法和溶脱法的亚微米ZnO:Al光栅制备
刘仁臣, 吴永刚, 夏子奂, 王振华, 唐平林, 梁钊铭. 湿法和溶脱法的亚微米ZnO:Al光栅制备[J]. 强激光与粒子束, 2012, 24(11): 2613.
Liu Renchen, Wu Yonggang, Xia Zihuan, Wang Zhenhua, Tang Pinglin, Liang Zhaoming. Farbrication of submicron ZnO:Al gratings with wet etching and lift-off technology[J]. High Power Laser and Particle Beams, 2012, 24(11): 2613.
[1] Berginski M, Hüpkes J, Schulte M, et al. The effect of front ZnO:Al surface texture and optical transparency on efficient light trapping in silicon thin-film solar cells[J].Journal of Applied Physics,2007,101:074903.
[2] Yoo J, Dhungel S K, Gowtham M, et al. Properties of textured ZnO:Al films prepared by RF magnetron sputtering for thin film solar cells[J].Journal of the Korean Physical Society, 2005, 47:576-580.
[4] Campa A, Krc J, Topic M. Analysis and optimisation of microcrystalline silicon solar cells with periodic sinusoidal textured interfaces by two-dimensional optical simulations[J].Journal of Applied Physics, 2009,105:083107.
[5] Eisele C, Nebel C E, Stutzmann M. Periodic light coupler gratings in amorphous thin film solar cells[J].Journal of Applied Physics, 2001, 89(12):7722-7726.
[6] Senoussaoui N, Krause M, Muller J, et al. Thin-film solar cells with periodic grating coupler[J].Thin Solid Films,2004,451:97-401.
[7] Leem J W, Song Y M, Lee Y T, et al. Antireflective properties of AZO subwavelength gratings patterned by holographic lithography[J].Applied Physics B,2010,99:695-700.
[8] Haacke G. New figure of merit for transparent conductors[J].Journal of Applied Physics,1976,47(9):4086-4089.
[10] Park K C, Ma D Y, Kim K H. The physical properties of Al-doped zinc oxide films prepared by RF magnetron sputtering[J].Thin Solid Films,1997,305:201-209.
[11] 范丽琴, 裴瑜, 林丽梅, 等. 溅射功率对掺铝氧化锌薄膜光电学性质的影响[J]. 福建师范大学学报, 2008, 24(5):44-49.(Fan Liqin, Pei Yu, Lin Limei, et al. Influence of sputtering power on the optical and electrical properties of ZnO:Al films. Journal of Fujian Normal University, 2008,24(5):44-49)
[12] Stiebig H, Senoussaoui N, Zahren C, et al. Silicon thin-film solar cells with rectangular-shaped grating couplers [J].Prog Photovolt: Res Appl.2006,14:13-24.
[14] Heine C, Morf R H. Submicrometer gratings for solar energy applications[J].Appl Opt, 1995,34:2476-2482.
刘仁臣, 吴永刚, 夏子奂, 王振华, 唐平林, 梁钊铭. 湿法和溶脱法的亚微米ZnO:Al光栅制备[J]. 强激光与粒子束, 2012, 24(11): 2613. Liu Renchen, Wu Yonggang, Xia Zihuan, Wang Zhenhua, Tang Pinglin, Liang Zhaoming. Farbrication of submicron ZnO:Al gratings with wet etching and lift-off technology[J]. High Power Laser and Particle Beams, 2012, 24(11): 2613.