飞秒与纳秒激光刻蚀单晶硅对比研究 下载: 832次
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杨焕, 黄珊, 段军, 杜敏. 飞秒与纳秒激光刻蚀单晶硅对比研究[J]. 中国激光, 2013, 40(1): 0103003. Yang Huan, Huang Shan, Duan Jun, Du Min. Contrastive Study on Laser Ablation of Single-Crystal Silicon by 1030 nm Femtosecond Laser and 355 nm Nanosecond Laser[J]. Chinese Journal of Lasers, 2013, 40(1): 0103003.