Thermal analysis for fast thermal-response Si waveguide wrapped by SiN

Rui MIN; Ruiqiang JI; Lin YANG

doi:doi:10.1007/s12200-012-0187-8

Frontiers of Optoelectronics, 2012, 5 (1): 73, 网络出版: 2012-09-10

Thermal analysis for fast thermal-response Si waveguide wrapped by SiN

Rui MIN Ruiqiang JI Lin YANG ^*

作者单位

Optoelectronic System Laboratory, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

图 & 表

Rui MIN, Ruiqiang JI, Lin YANG. Thermal analysis for fast thermal-response Si waveguide wrapped by SiN[J]. Frontiers of Optoelectronics, 2012, 5(1): 73. Rui MIN, Ruiqiang JI, Lin YANG. Thermal analysis for fast thermal-response Si waveguide wrapped by SiN[J]. Frontiers of Optoelectronics, 2012, 5(1): 73.