半导体光电, 2020, 41 (4): 517, 网络出版: 2020-08-18
预电离效应对ArF准分子激光特性的影响分析
Effects of Preionization on Properties of ArF Excimer Laser
补充材料
苏丹, 赵江山, 王倩. 预电离效应对ArF准分子激光特性的影响分析[J]. 半导体光电, 2020, 41(4): 517. SU Dan, ZHAO Jiangshan, WANG Qian. Effects of Preionization on Properties of ArF Excimer Laser[J]. Semiconductor Optoelectronics, 2020, 41(4): 517.