均压槽对空气静压轴承微振动的影响
陈琦, 陈斌, 蔡黎明. 均压槽对空气静压轴承微振动的影响[J]. 光学 精密工程, 2014, 22(12): 3354.
CHEN Qi, CHEN Bin, CAI Li-ming. Effect of equalizing groove on small vibration of aerostatic bearings[J]. Optics and Precision Engineering, 2014, 22(12): 3354.
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陈琦, 陈斌, 蔡黎明. 均压槽对空气静压轴承微振动的影响[J]. 光学 精密工程, 2014, 22(12): 3354. CHEN Qi, CHEN Bin, CAI Li-ming. Effect of equalizing groove on small vibration of aerostatic bearings[J]. Optics and Precision Engineering, 2014, 22(12): 3354.