光学 精密工程, 2014, 22 (12): 3354, 网络出版: 2015-01-13
均压槽对空气静压轴承微振动的影响
Effect of equalizing groove on small vibration of aerostatic bearings
补充材料
陈琦, 陈斌, 蔡黎明. 均压槽对空气静压轴承微振动的影响[J]. 光学 精密工程, 2014, 22(12): 3354. CHEN Qi, CHEN Bin, CAI Li-ming. Effect of equalizing groove on small vibration of aerostatic bearings[J]. Optics and Precision Engineering, 2014, 22(12): 3354.