高灵敏度微型光学原子磁力仪研究进展

吴梓楠; 赵正钦; 温钟平; 覃添; 欧中华; 周晓军; 刘永; 岳慧敏

doi:doi:10.3788/LOP57.230002

激光与光电子学进展, 2020, 57 (23): 230002, 网络出版: 2020-12-08

高灵敏度微型光学原子磁力仪研究进展下载： 2092次

Research Progress on High Sensitivity and Miniature Optical-Atomic Magnetometer

吴梓楠赵正钦温钟平覃添欧中华周晓军刘永岳慧敏 ^*

作者单位

电子科技大学光电科学与工程学院电子薄膜与集成器件国家重点实验室, 四川成都 610054

图 & 表

图 1. 光学原子磁力仪的物理学过程示意图

Fig. 1. Physical process diagram of optical-atomic magnetometer

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图 2. 磁力仪系统结构图

Fig. 2. Structural diagram of magnetometer system

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图 3. 电子自旋光泵浦示意图,σ⁺表示左旋圆偏振光^[10]

Fig. 3. Diagram of electron spin optical pump. σ⁺represents left circularly polarized light^[10]

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图 4. 玻璃吹制法步骤图以及原子气室实物图^[40]。(a)玻璃吹制法步骤图;(b)原子气室实物图,黑色箭头表示1 mm

Fig. 4. Step diagram of glass blowing method, and physical drawing of atomic vapor cell^[40]. (a) Step diagram of glass blowing method; (b) physical drawing of atomic vapor cell. The black arrow indicates 1 mm

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图 5. MEMS工艺制作原子气室的流程图^[45]

Fig. 5. Flow chart of atomic vapor cell fabrication based on MEMS^[45]

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图 6. 原子气室俯视图和原子气室实物图^[47]。(a)原子气室俯视图;(b)原子气室实物图

Fig. 6. Top view of atomic vapor cell and physical drawing of atomic vapor cell^[47]. (a) Top view of atomic vapor cell; (b) physical drawing of atomic vapor cell

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图 7. 碱金属直接填充法流程图^[49]

Fig. 7. Flow chart of alkali metal direct filling method^[49]

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图 8. 化学反应法制备原子气室流程图^[51]

Fig. 8. Flow chart of atomic vapor cell fabrication by chemical reaction method^[51]

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图 9. 紫外(UV)分解前(左)、分解后(右)的微型原子气室^[55]

Fig. 9. Miniature atomic vapor cell before (left) and after (right) UV decomposition^[55]

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图 10. 超精细线宽和缓冲气体压强关系图^[39]

Fig. 10. Relationship between ultra-fine linewidth and buffer gas pressure^[39]

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图 11. 碱金属原子粒子数密度与温度的关系图

Fig. 11. Relationship between number density of alkali metal atoms and temperature

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图 12. 光学检测方案。 (a)吸收测量^[69];(b)相移测量^[70]

Fig. 12. Optical detection schemes. (a) Absorption detection^[69]; (b) phase-shifting detection^[70]

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图 13. 传感头实物图和原理示意图^[63]。(a)传感头实物图;(b)原理示意图

Fig. 13. Physical drawing and schematic diagram of sensor head^[63]. (a) Physical drawing of sensor head; (b) schematic diagram

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图 14. NIST提出的微型传感头制作演化历程^[26]

Fig. 14. Evolution of miniature sensor head proposed by NIST^[26]

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图 15. 中国科学院研制的微型光泵原子磁力仪^[98]

Fig. 15. Miniature optical pump atomic magnetometer proposed by Chinese Academy of Sciences^[98]

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表 1各种碱金属填充方法的对比

Table1. Comparison of different alkali metal filling methods

Filling method	Advantage	Disadvantage
Alkali metal direct filling method	High purity, no impurities	Process is difficult
Chemical reaction method	Easy to operate	Introduce impurities,buffer gas concentrationis difficult to control, and
Light heating/decomposition method	Easy to operate, no impurities	reaction time is long

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表 2不同加热方式对比

Table2. Comparison of different heating methods

Heating method	Advantage	Disadvantage
Alternating current heating	High speed, good stability	Introduce additional magnetic noise
Interruption current heating	High speed, no additional magnetic noise	Unable to measure continuously,large temperature drift
Light heating	No additional magnetic noise, easy tointegrate	Unable to heat large atomic vaporcell due to low power
Hot air flow heating	No additional magnetic noise,simple structure	Low speed, large volume

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吴梓楠, 赵正钦, 温钟平, 覃添, 欧中华, 周晓军, 刘永, 岳慧敏. 高灵敏度微型光学原子磁力仪研究进展[J]. 激光与光电子学进展, 2020, 57(23): 230002. Zinan Wu, zhengqin Zhao, Zhongping Wen, Tian Qin, Zhonghua Ou, Xiaojun Zhou, Yong Liu, Huimin Yue. Research Progress on High Sensitivity and Miniature Optical-Atomic Magnetometer[J]. Laser & Optoelectronics Progress, 2020, 57(23): 230002.

高灵敏度微型光学原子磁力仪研究进展下载： 2092次

图 1. 光学原子磁力仪的物理学过程示意图

Fig. 1. Physical process diagram of optical-atomic magnetometer

图 2. 磁力仪系统结构图

Fig. 2. Structural diagram of magnetometer system

图 3. 电子自旋光泵浦示意图,σ⁺表示左旋圆偏振光^[10]

Fig. 3. Diagram of electron spin optical pump. σ⁺represents left circularly polarized light^[10]

图 4. 玻璃吹制法步骤图以及原子气室实物图^[40]。(a)玻璃吹制法步骤图;(b)原子气室实物图,黑色箭头表示1 mm

Fig. 4. Step diagram of glass blowing method, and physical drawing of atomic vapor cell^[40]. (a) Step diagram of glass blowing method; (b) physical drawing of atomic vapor cell. The black arrow indicates 1 mm

图 5. MEMS工艺制作原子气室的流程图^[45]

Fig. 5. Flow chart of atomic vapor cell fabrication based on MEMS^[45]

图 6. 原子气室俯视图和原子气室实物图^[47]。(a)原子气室俯视图;(b)原子气室实物图

Fig. 6. Top view of atomic vapor cell and physical drawing of atomic vapor cell^[47]. (a) Top view of atomic vapor cell; (b) physical drawing of atomic vapor cell

图 7. 碱金属直接填充法流程图^[49]

Fig. 7. Flow chart of alkali metal direct filling method^[49]

图 8. 化学反应法制备原子气室流程图^[51]

Fig. 8. Flow chart of atomic vapor cell fabrication by chemical reaction method^[51]

图 9. 紫外(UV)分解前(左)、分解后(右)的微型原子气室^[55]

Fig. 9. Miniature atomic vapor cell before (left) and after (right) UV decomposition^[55]

图 10. 超精细线宽和缓冲气体压强关系图^[39]

Fig. 10. Relationship between ultra-fine linewidth and buffer gas pressure^[39]

图 11. 碱金属原子粒子数密度与温度的关系图

Fig. 11. Relationship between number density of alkali metal atoms and temperature

图 12. 光学检测方案。 (a)吸收测量^[69];(b)相移测量^[70]

Fig. 12. Optical detection schemes. (a) Absorption detection^[69]; (b) phase-shifting detection^[70]

图 13. 传感头实物图和原理示意图^[63]。(a)传感头实物图;(b)原理示意图

Fig. 13. Physical drawing and schematic diagram of sensor head^[63]. (a) Physical drawing of sensor head; (b) schematic diagram

图 14. NIST提出的微型传感头制作演化历程^[26]

Fig. 14. Evolution of miniature sensor head proposed by NIST^[26]

图 15. 中国科学院研制的微型光泵原子磁力仪^[98]

Fig. 15. Miniature optical pump atomic magnetometer proposed by Chinese Academy of Sciences^[98]

表 1各种碱金属填充方法的对比

Table1. Comparison of different alkali metal filling methods

表 2不同加热方式对比

Table2. Comparison of different heating methods

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图 1. 光学原子磁力仪的物理学过程示意图

Fig. 1. Physical process diagram of optical-atomic magnetometer

图 2. 磁力仪系统结构图

Fig. 2. Structural diagram of magnetometer system

图 3. 电子自旋光泵浦示意图,σ+表示左旋圆偏振光[10]

Fig. 3. Diagram of electron spin optical pump. σ+ represents left circularly polarized light[10]

图 4. 玻璃吹制法步骤图以及原子气室实物图[40]。(a)玻璃吹制法步骤图;(b)原子气室实物图,黑色箭头表示1 mm

Fig. 4. Step diagram of glass blowing method, and physical drawing of atomic vapor cell[40]. (a) Step diagram of glass blowing method; (b) physical drawing of atomic vapor cell. The black arrow indicates 1 mm

图 5. MEMS工艺制作原子气室的流程图[45]

Fig. 5. Flow chart of atomic vapor cell fabrication based on MEMS[45]

图 6. 原子气室俯视图和原子气室实物图[47]。(a)原子气室俯视图;(b)原子气室实物图

Fig. 6. Top view of atomic vapor cell and physical drawing of atomic vapor cell[47]. (a) Top view of atomic vapor cell; (b) physical drawing of atomic vapor cell

图 7. 碱金属直接填充法流程图[49]

Fig. 7. Flow chart of alkali metal direct filling method[49]

图 8. 化学反应法制备原子气室流程图[51]

Fig. 8. Flow chart of atomic vapor cell fabrication by chemical reaction method[51]

图 9. 紫外(UV)分解前(左)、分解后(右)的微型原子气室[55]

Fig. 9. Miniature atomic vapor cell before (left) and after (right) UV decomposition[55]

图 10. 超精细线宽和缓冲气体压强关系图[39]

Fig. 10. Relationship between ultra-fine linewidth and buffer gas pressure[39]

图 11. 碱金属原子粒子数密度与温度的关系图

Fig. 11. Relationship between number density of alkali metal atoms and temperature

图 12. 光学检测方案。 (a)吸收测量[69];(b)相移测量[70]

Fig. 12. Optical detection schemes. (a) Absorption detection[69]; (b) phase-shifting detection[70]

图 13. 传感头实物图和原理示意图[63]。(a)传感头实物图;(b)原理示意图

Fig. 13. Physical drawing and schematic diagram of sensor head[63]. (a) Physical drawing of sensor head; (b) schematic diagram

图 14. NIST提出的微型传感头制作演化历程[26]

Fig. 14. Evolution of miniature sensor head proposed by NIST[26]

图 15. 中国科学院研制的微型光泵原子磁力仪[98]

Fig. 15. Miniature optical pump atomic magnetometer proposed by Chinese Academy of Sciences[98]

表 1各种碱金属填充方法的对比

Table1. Comparison of different alkali metal filling methods

表 2不同加热方式对比

Table2. Comparison of different heating methods

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高灵敏度微型光学原子磁力仪研究进展下载： 2092次

图 3. 电子自旋光泵浦示意图,σ⁺表示左旋圆偏振光^[10]

Fig. 3. Diagram of electron spin optical pump. σ⁺represents left circularly polarized light^[10]

图 4. 玻璃吹制法步骤图以及原子气室实物图^[40]。(a)玻璃吹制法步骤图;(b)原子气室实物图,黑色箭头表示1 mm

Fig. 4. Step diagram of glass blowing method, and physical drawing of atomic vapor cell^[40]. (a) Step diagram of glass blowing method; (b) physical drawing of atomic vapor cell. The black arrow indicates 1 mm

图 5. MEMS工艺制作原子气室的流程图^[45]

Fig. 5. Flow chart of atomic vapor cell fabrication based on MEMS^[45]

图 6. 原子气室俯视图和原子气室实物图^[47]。(a)原子气室俯视图;(b)原子气室实物图

Fig. 6. Top view of atomic vapor cell and physical drawing of atomic vapor cell^[47]. (a) Top view of atomic vapor cell; (b) physical drawing of atomic vapor cell

图 7. 碱金属直接填充法流程图^[49]

Fig. 7. Flow chart of alkali metal direct filling method^[49]

图 8. 化学反应法制备原子气室流程图^[51]

Fig. 8. Flow chart of atomic vapor cell fabrication by chemical reaction method^[51]

图 9. 紫外(UV)分解前(左)、分解后(右)的微型原子气室^[55]

Fig. 9. Miniature atomic vapor cell before (left) and after (right) UV decomposition^[55]

图 10. 超精细线宽和缓冲气体压强关系图^[39]

Fig. 10. Relationship between ultra-fine linewidth and buffer gas pressure^[39]

图 12. 光学检测方案。 (a)吸收测量^[69];(b)相移测量^[70]

Fig. 12. Optical detection schemes. (a) Absorption detection^[69]; (b) phase-shifting detection^[70]

图 13. 传感头实物图和原理示意图^[63]。(a)传感头实物图;(b)原理示意图

Fig. 13. Physical drawing and schematic diagram of sensor head^[63]. (a) Physical drawing of sensor head; (b) schematic diagram

图 14. NIST提出的微型传感头制作演化历程^[26]

Fig. 14. Evolution of miniature sensor head proposed by NIST^[26]

图 15. 中国科学院研制的微型光泵原子磁力仪^[98]

Fig. 15. Miniature optical pump atomic magnetometer proposed by Chinese Academy of Sciences^[98]