Design method for freeform reflective-imaging systems with low surface-figure-error sensitivity

Yuting Deng; Guofan Jin; Jun Zhu

doi:doi:10.3788/COL201917.092201

Chinese Optics Letters, 2019, 17 (9): 092201, Published Online: Jul. 29, 2019

Design method for freeform reflective-imaging systems with low surface-figure-error sensitivity Download： 873次

Yuting Deng Guofan Jin Jun Zhu ^*

Author Affiliations

State Key Laboratory of Precision Measurements Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China

Figures & Tables

Fig. 5. (a) Initial planar system; (b) initial freeform surfaces system; (c) freeform surfaces system with $| θ_{1} |$ greater than $w_{1}$ ; (d) freeform surfaces system, in which $| θ_{1} |$ , $| θ_{2} |$ are greater than $w_{1}$ , $w_{2}$ , respectively; (e) initial system with low surface-figure-error sensitivity, in which $| θ_{1} |$ , $| θ_{2} |$ , and $| θ_{3} |$ are greater than $w_{1}$ , $w_{2}$ , and $w_{3}$ , respectively; (f) optimized system; (g) field map of the RMSWFE.

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Fig. 6. (a) Initial planar system; (b) initial system designed by CI-3D method; (c) optimized system; (d) field map of the RMSWFE.

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Fig. 7. Sensitivity curve of the two systems to surface figure errors. (a) PM; (b) SM; (c) TM.

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Table1. Optical System Specifications

Parameter	Specification
Field of view (FOV)	$3 ° \times 4 °$
F-number	1.5
Focal length	100 mm
Wavelength	8–12 μm

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Table2. Absolute AOIs on Each Surface of the Systems in Fig. 5a

System	AOI	PM	SM	TM
(a)	Min	30	25	25
(b)	Min	28.34	21.66	19.25
(c)	Min	30.36	22.49	19.64
(d)	Min	30.36	25.46	21.60
(e)	Min	30.36	25.46	25.62
(f)	Min	43.58	51.75	26.27

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Yuting Deng, Guofan Jin, Jun Zhu. Design method for freeform reflective-imaging systems with low surface-figure-error sensitivity[J]. Chinese Optics Letters, 2019, 17(9): 092201.

Design method for freeform reflective-imaging systems with low surface-figure-error sensitivity Download： 873次

Fig. 1. Optical-path-length change caused by figure errors.

Fig. 2. Establish initial planar system.

Fig. 3. (a) Forward ray tracing; (b) reverse ray tracing.

Fig. 4. Shifting image points to change AOIs on the TM.

Fig. 6. (a) Initial planar system; (b) initial system designed by CI-3D method; (c) optimized system; (d) field map of the RMSWFE.

Fig. 7. Sensitivity curve of the two systems to surface figure errors. (a) PM; (b) SM; (c) TM.

Table1. Optical System Specifications

Table2. Absolute AOIs on Each Surface of the Systems in Fig. 5a

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Design method for freeform reflective-imaging systems with low surface-figure-error sensitivity Download： 873次

Fig. 1. Optical-path-length change caused by figure errors.

Fig. 2. Establish initial planar system.

Fig. 3. (a) Forward ray tracing; (b) reverse ray tracing.

Fig. 4. Shifting image points to change AOIs on the TM.

Fig. 6. (a) Initial planar system; (b) initial system designed by CI-3D method; (c) optimized system; (d) field map of the RMSWFE.

Fig. 7. Sensitivity curve of the two systems to surface figure errors. (a) PM; (b) SM; (c) TM.

Table1. Optical System Specifications

Table2. Absolute AOIs on Each Surface of the Systems in Fig. 5a

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