激光功率计发展及应用 
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Development and Applications of Laser Power Meter
天津大学精密测试技术及仪器国家重点实验室，微纳制造实验室，天津 300072
图 & 表
图 1. 激光功率测量原理发展历程
Fig. 1. Historical process of laser power measurement development
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图 2. PIN型光电二极管传感器结构
Fig. 2. PIN photodiode sensor structure
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图 3. 应用于激光功率检测的热电堆传感器结构
Fig. 3. Sensor structure based on electric thermopile for laser power measurement
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图 4. 热释电光功率传感器基本结构
Fig. 4. Structure of pyroelectric sensor for optical power measurement
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图 5. 低温绝对辐射计测量系统示意图[44]
Fig. 5. System diagram of cryogenic absolute radiometer[44]
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图 6. 流水式光功率计示意图[48]。(a)典型的流水式光功率计；(b)流水式光功率计的校准装置
Fig. 6. Diagrams of flowing-water optical power meter[48]. (a) Typical flowing-water optical power meter; (b) calibration device of flowing-water optical power meter
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图 7. 典型光致动力学光功率测量装置。(a)悬挂式测量结构[66]；(b)磁悬浮结构的测量装置以及校准装置示意图[64]；(c)由电容传感器集成的弹簧平衡式结构[63]
Fig. 7. Typical diagrams of optical power measuring system by optodynamics. (a) Diagram of hanging measuring system[66]; (b) diagram of measuring system and calibration of maglev structure[64]; (c) spring structure integrated with capacitance sensor[63]
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图 8. 积分球结构示意图
Fig. 8. Diagram of integrating sphere
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图 9. 激光功率计在光纤通信中的应用
Fig. 9. Application of laser power meter in optical fiber communication
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图 10. BOTDR系统示意图[73]
Fig. 10. Diagram of BOTDR system[73]
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图 11. Q-switch消光比测量系统示意图
Fig. 11. Q-switch extinction ratio measuring system
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表 1典型光功率计的优缺点
Table1. Characteristics of typical optical power meter
| Method of laser power measurement | Advantage | Disadvantage |
|---|
| Photodiode | Relatively simple structure; the requirement of external temperature is not too strict; quicker response compared to laser power meters based on thermal effect | Lack of robustness for electromagnetic noise; bad spectral response | | Thermopile | Flat spectral response; high saturation point; not sensitive to laser spot location and incident angle | Relatively slower response | | Pyroelectric | High precision; fast response; ability to measure the energy of single laser pulse | Low durability | | Cryogenic absolute radiometer (CAR) | Very high precision | Complicated measurement system | | Flowing-water | Ability to measure the power up to tens of kilowatts | Low response speed |
|
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陈舒凡, 房丰洲. 激光功率计发展及应用[J]. 激光与光电子学进展, 2021, 58(9): 0900003. Shufan Chen, Fengzhou Fang. Development and Applications of Laser Power Meter[J]. Laser & Optoelectronics Progress, 2021, 58(9): 0900003.
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