为了减少相移干涉仪中压电陶瓷致动器进行相移时，其迟滞非线性对相移算法中的相位计算带来的误差，设计了一套压电陶瓷致动器的控制系统.利用高精度电阻应变传感器和基于锁相放大原理的信号调理电路检测压电陶瓷致动器位移，建立多项式数学模型描述迟滞非线性，然后提出了一种前馈开环控制方法补偿其迟滞非线性.最后，基于所提出的方案对压电陶瓷致动器进行了期望轨迹的跟踪控制实验，同时将补偿控制系统与干涉仪相结合检测光学元件表面形貌.实验结果表明：补偿后，压电陶瓷致动器的跟踪误差在-0.156 μm与+0.078 μm之间，迟滞非线性度由10.4%降到2.4%，且干涉仪所测得的光学元件表面面形起伏高度均方根和峰谷分别改变了0.795 nm和3.937 nm.该系统对于高精度的光学元件形貌检测具有重要的意义.

In order to reduce the error of phase calculation caused by the hysteresis nonlinear of piezoelectric ceramic actuator in phase-shifting interferometer, a control system for a piezoelectric ceramic actuator is designed. The high precision resistance strain sensor and signal conditioning circuit based on the principle of phase-locked amplification are used to detect the displacement of the piezoelectric ceramic actuator. A polynomial mathematical model is established to describe the hysteresis nonlinearity. And then, a feed-forward open-loop control method is proposed to compensate for the hysteresis nonlinearity. Finally, based on the proposed scheme, a tracking control experiment of the desired trajectory of the piezoelectric ceramic actuator is performed. At the same time, a compensation control system and an interferometer are used to detect the surface morphology of the optical element. The experimental results show that after compensation, the tracking error of the piezoelectric ceramic actuator is between -0.156 μm and +0.078 μm, and the hysteresis nonlinearity is reduced from 10.4% to 2.4%, and the surface shape undulated height Root Mean Square (RMS) and Peak Valley (PV) of the optical element measured by the interferometer are changed by 0.795 nm and 3.937 nm respectively. It shows that this system is of great significance for the high-precision shape detection of optical components.