Hybrid nano-scale Au with ITO structure for a high-performance near-infrared silicon-based photodetector with ultralow dark current

Xinxin Li; Zhen Deng; Jun Li; Yangfeng Li; Linbao Guo; Yang Jiang; Ziguang Ma; Lu Wang; Chunhua Du; Ying Wang; Qingbo Meng; Haiqiang Jia; Wenxin Wang; Wuming Liu; Hong Chen

doi:doi:10.1364/PRJ.398450

Photonics Research, 2020, 8 (11): 11001662, Published Online: Oct. 10, 2020

Hybrid nano-scale Au with ITO structure for a high-performance near-infrared silicon-based photodetector with ultralow dark current Download： 668次

Xinxin Li ^1,2,3Zhen Deng ^1,3,4,*Jun Li ^1,3Yangfeng Li ^1,3Linbao Guo ^1,2,3Yang Jiang ^1,3Ziguang Ma ^1,3Lu Wang ^1,3Chunhua Du ^1,3,4Ying Wang ⁵Qingbo Meng ^1,3Haiqiang Jia ^1,3,6Wenxin Wang ^1,3,6Wuming Liu ¹Hong Chen ^1,3,6,7

Author Affiliations

¹ Key Laboratory for Renewable Energy, Beijing Key Laboratory for New Energy Materials and Devices, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China

² University of Chinese Academy of Sciences, Beijing 100049, China

³ Center of Materials and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

⁴ The Yangtze River Delta Physics Research Center, Liyang 213000, China

⁵ Department of Physics, School of Science, Beijing Jiaotong University, Beijing 100044, China

⁶ Songshan Lake Materials Laboratory, Dongguan 523808, China

⁷ e-mail: hchen@iphy.ac.cn

Suppl. Mat.

Xinxin Li, Zhen Deng, Jun Li, Yangfeng Li, Linbao Guo, Yang Jiang, Ziguang Ma, Lu Wang, Chunhua Du, Ying Wang, Qingbo Meng, Haiqiang Jia, Wenxin Wang, Wuming Liu, Hong Chen. Hybrid nano-scale Au with ITO structure for a high-performance near-infrared silicon-based photodetector with ultralow dark current[J]. Photonics Research, 2020, 8(11): 11001662.

Hybrid nano-scale Au with ITO structure for a high-performance near-infrared silicon-based photodetector with ultralow dark current Download： 668次

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