光学学报, 1996, 16 (8): 1194, 网络出版: 2006-12-04
激光直接光刻制作微透镜列阵的方法研究
Microlens Array Fabrication by Using Laser Direct Lithography System
摘要
介绍了利用激光直接光刻技术制作8相位台阶菲涅尔衍射微透镜列阵的工艺方法，并对元件的衍射效率及光刻过程中的制作误差进行了分析，透镜列阵在小形夏克-哈特曼波前传感器中得到了应用。
Abstract
In the paper, the method for fabrication of diffractive microlens array using laser direct lithography system and reactive etching machine is described. The diffractive efficiency and the fabricating errors are analyzed. The microlens array has been used in a minature Shack Hartmann wavefront sensor.
参考文献
杜春雷, 林大键, 冯伯儒, 孙国良, 徐平, 郭履容. 激光直接光刻制作微透镜列阵的方法研究[J]. 光学学报, 1996, 16(8): 1194. 杜春雷, 林大键, 冯伯儒, 孙国良, 徐平, 郭履容. Microlens Array Fabrication by Using Laser Direct Lithography System[J]. Acta Optica Sinica, 1996, 16(8): 1194.
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