高斯光束对标准硅球直径测量的影响分析
康岩辉, 邾继贵, 罗志勇, 叶声华. 高斯光束对标准硅球直径测量的影响分析[J]. 光学学报, 2008, 28(11): 2148.
Kang Yanhui, Zhu Jigui, Luo Zhiyong, Ye Shenghua. Impact Analysis of Gaussian Beam on Measurement of Single Crystal Silicon Sphere Diameter[J]. Acta Optica Sinica, 2008, 28(11): 2148.
[1] . . Density determination of silicon spheres using an interferometer with optical frequency tuning[J]. IEEE Trans. Instrum. Measure., 2007, 56(2): 476-480.
[2] . 质量自然基准的研究进展及发展方向[J]. 计量学报, 2004, 25(2): 138-141.
. The progress and development trend of mass natural standard[J]. Acta Metrologica Sinica, 2004, 25(2): 138-141.
[3] 罗志勇, 杨丽峰, 陈允昌. 精密干涉测量中余弦依赖算法的误差研究[J]. 光学学报, 2005, 25(12): 1629~1633
[4] 吕晓旭, 钟丽云, 张以谟. 通过相移条纹图差分测定相移量的方法[J]. 光学学报, 2007, 27(4): 603~608
[5] 左芬,陈磊, 徐晨. 同步移相干涉的测量性能[J]. 中国激光, 2007, 34(12): 1682~1687
[6] 刘木林, 吴正茂, 夏光琼. 高斯光束斜入射非平行法布里-珀罗干涉仪后的透射光强分布[J]. 光学学报, 2005, 25(1): 109~114
[7] . 激光高斯光束对大角度干涉测量的影响[J]. 北京机械工业学院学报, 1999, 14(2): 42-46.
. Influence of Guass characteristics of laser on angle interferometry of large range[J]. J. Beijing Institute of Machinery, 1999, 14(2): 42-46.
[8] . Abu-Safia, R. Al-Tahtamouni, I. Abu-Aljarayesh et al.. Transmission of a Gaussian beam through a Fabry-Perot interferometer[J]. Appl. Opt., 1994, 33(18): 3805-3811.
[9] . Fujii, M. Tanaka, Y. New et al.. lnterferometric measurements of the diameters of a single-crystal silicon sphere[J]. Rev. Sci. Instrum., 1992, 63(11): 5320-5325.
[10] . Interferometric determination of the diameter of a silicon sphere using a direct optical frequency tuning system[J]. IEEE Trans. Instrum. Measure., 2003, 52(2): 631-635.
[11] 孙长库, 叶声华. 激光测量技术[M]. 天津: 天津大学出版社, 2001. 12~15
Sun Changku, Ye Shenghua. Laser Measuring Technology[M]. Tianjin: Tianjin University Press, 2001. 12~15
[12] . Hariharan, B. F. Oreb, T. Eiju. Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm[J]. Appl. Opt., 1987, 26(13): 2504-2506.
[13] 罗志勇, 陈朝晖, 顾英姿 等. 基于数值模拟的高准确度五步相移算法研究[J]. 光学学报, 2006, 26(11): 1687~1690
[14] . 基于多光束干涉原理的相移算法研究[J]. 物理学报, 2005, 54(7): 3051-3057.
. Phase-shift algorithm research based on multiple-beam interference principle[J]. Acta Physica Sinica, 2005, 54(7): 3051-3057.
康岩辉, 邾继贵, 罗志勇, 叶声华. 高斯光束对标准硅球直径测量的影响分析[J]. 光学学报, 2008, 28(11): 2148. Kang Yanhui, Zhu Jigui, Luo Zhiyong, Ye Shenghua. Impact Analysis of Gaussian Beam on Measurement of Single Crystal Silicon Sphere Diameter[J]. Acta Optica Sinica, 2008, 28(11): 2148.