[1] Feit M D, Exarhos G J, Rubenchik A M, et al. Influence of subsurface cracks on laser-induced surface damage［C］. SPIE, 2003, 5273: 264-272.

[2] Bertussi B, Cormont P, Palmier S, et al. Initiation of laser-induced damage sites in fused silica optical components［J］. Optics Express, 2009, 17(14): 11469-11479.

[3] 张龙霞, 朱晓冰, 李风雨. 材料表面缺陷对激光热损伤的影响［J］. 光学学报, 2016, 36(9): 0914001.

    Zhang Longxia, Zhu Xiaobing, Li Fengyu, et al. Laser-induced thermal damage influenced by surface defects of materials［J］. Acta Optica Sinica, 2016, 36(9): 0914001.

[4] 王洪祥, 沈璐, 李成福, 等. 光学元件激光诱导损伤分析及实验研究［J］. 中国激光, 2017, 44(3): 0302006.

    Wang Hongxiang, Shen Lu, Li Chengfu, et al. Analysis and experimental investigation of laser induced damage of optics［J］. Chinese J Lasers, 2017, 44(3): 0302006.

[5] 王世通, 杨甬英, 赵丽敏, 等. 光学元件表面缺陷散射光成像数值模拟研究［J］. 中国激光, 2015, 42(7): 0708005.

    Wang Shitong, Yang Yongying, Zhao Limin, et al. Numerical simulation research on scattering light imaging of surface defects of optical components［J］. Chinese J Lasers, 2015, 42(7): 0708005.

[6] 罗茂, 步扬, 徐静浩, 等. 基于多光谱技术的光学元件表面疵病检测［J］. 中国激光, 2017, 44(1): 0104001.

    Luo Mao, Bu Yang, Xu Jinghao, et al. Optical element surface defect measurement based on multispectral technique［J］. Chinese J Lasers, 2017, 44(1): 0104001.

[7] 戴子华, 朱永伟, 李军, 等. 固结磨料研磨K9玻璃亚表面损伤层深度测量方法研究［J］. 金刚石与磨料磨具工程, 2014(5): 6-12.

    Dai Zihua, Zhu Yongwei, Li Jun, et al. Comparison of different methods to measure the subsurface damage depth of K9 glass lapped by fixed abrasive polishing pad［J］. Diamond & Abrasives Engineering, 2014(5): 6-12.

[8] 胡陈林, 毕果, 叶卉, 等. 光学元件磨削加工亚表面损伤检测研究［J］. 人工晶体学报, 2014, 43(11): 2929-2934.

    Hu Chenlin, Bi Guo, Ye Hui, et al. Research on detection of subsurface damage on grinding optical elements［J］. Journal of Synthetic Crystals, 2014, 43(11): 2929-2934.

[9] 徐乐, 郭剑, 余丙军, 等. 一种快速检测单晶硅亚表面损伤层厚度的方法［J］. 机械工程学报, 2016, 52(11): 108-114.

    Xu Le, Guo Jian, Yu Bingjun, et al. Rapid detection on the thickness of subsurface damage layer of silicon［J］. Journal of Mechanical Engineering, 2016, 52(11): 108-114.

[10] Wang Z, Wang L, Yang J, et al. Detection of subsurface trace impurity in polished fused silica with biological method［J］. Optics Express, 2014, 22(18): 21292-21301.

[11] Kozlowski M R, Nichols M A. Subsurface damage and polishing compound affect the 355-nm laser damage threshold of fused silica surfaces［C］. SPIE, 1998, 3244: 356-364.

[12] 王卓, 吴宇列, 戴一帆, 等. 研磨加工中光学材料亚表面损伤的表征方法［J］. 纳米技术与精密工程, 2008, 6(5): 349-355.

    Wang Zhuo, Wu Yulie, Dai Yifan, et al. Characterization of subsurface damage of optical materials in lapping process［J］. Nanotehcnology and Precision Engineer, 2008, 6(5): 349-355.

[13] 王卓, 吴宇列, 戴一帆, 等. 光学材料磨削加工亚表面损伤层深度测量及预测方法研究［J］. 航空精密制造技术, 2007, 43(5): 1-5.

    Wang Zhuo, Wu Yulie, Dai Yifan, et al. Research on measurement and prediction methods of subsuface damage depth of optical materials in grinding process［J］. Aviation Precision Manufacturing Tehcnology, 2007, 43(5): 1-5.

[14] Zhang Y X, Kang R K, Guo D M, et al. Raman microspectroscopy study on the ground surface of monocrystalline silicon wafers［J］. Key Engineering Materials, 2006, 304/305: 241-245.

[15] Yang F, Fei P. Microindentation of ground silicon wafers［J］. Semiconductor Science & Technology, 2004, 19(9): 1165-1168.

[16] Yang F. Effect of subsurface damage on indentation behavior of ground ULETM glass［J］. Journal of Non-Crystalline Solids, 2005, 351(52/53/54): 3861-3865.

[17] Ma B, Shen Z, He P, et al. Evaluation and analysis of polished fused silica subsurface quality by the nanoindenter technique［J］. Applied Optics, 2011, 50(9): 279-285.

[18] 李改灵, 吴宇列, 王卓, 等. 光学材料亚表面损伤深度破坏性测量技术的实验研究［J］. 航空精密制造工程, 2006, 42(6): 19-22.

    Li Gailing, Wu Yulie, Wang Zhuo, et al. Experiment study on the destructive measurement of the depth of SSD for optical material［J］. Aviation Precision Manufacturing Tehcnology, 2006, 42(6): 19-22.

[19] 王建彬, 朱永伟, 王加顺, 等. 研磨方式对单晶蓝宝石亚表面损伤层深度的影响［J］. 人工晶体学报, 2014, 43(5): 1099-1104.

    Wang Jianbin, Zhu Yongwei, Wang Jiashun, et al. Effect of lapping methods on subsurface damage depth of single crystal sapphire［J］. Journal of Synthetic Crystals, 2014, 43(5): 1099-1104.

[20] 吴沿鹏, 杨炜, 叶卉, 等. 光学元件亚表面损伤深度及形貌研究［J］. 制造技术与机床, 2013(10): 78-81.

    Wu Yanpeng, Yang Wei, Ye Hui, et al. Study on subsurface damage depth and morphology of optical elements［J］. Manufacturing Technology & Machine Tool, 2013(10): 78-81.

[21] 戴子华, 朱永伟, 王建彬, 等. K9玻璃亚表面损伤的分步腐蚀法测量［J］. 光学 精密工程, 2013, 21(2): 287-293.

    Dai Zihua, Zhu Yongwei, Wang Jianbin, et al. Measurement of subsurface damage of K9 glass by step-by-step etching method［J］. Optics and Precision Engineering, 2013, 21(2): 287-293.

[22] Esmaeilzare A, Rahimi A, Rezaei S M. Investigation of subsurface damages and surface roughness in grinding process of Zerodur glass-ceramic［J］. Applied Surface Science, 2014, 313(7): 67-75.

[23] Suratwala T, Wong L, Miller P, et al. Sub-surface mechanical damage distributions during grinding of fused silica［J］. Journal of Non-Crystalline Solids, 2006, 352(52/53/54): 5601-5617.

[24] Randi J A, Lambropoulos J C, Jacobs S D. Subsurface damage in some single crystalline optical materials［J］. Applied Optics, 2005, 44(12): 2241-2249.

[25] Zhou Y, Funkenbusch P D, Quesnel D J, et al. Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses［J］. Journal of the American Ceramic Society, 2010, 77(12): 3277-3280.

[26] Li S Y, Wang Z, Wu Y. Relationship between subsurface damage and surface roughness of optical materials in grinding and lapping processes［J］. Journal of Materials Processing Technology, 2008, 205(1/2/3): 34-41.

[27] 李圣怡, 王卓, 吴宇列, 等. 基于研磨加工参数的亚表面损伤预测理论和试验研究［J］. 机械工程学报, 2009, 45(2): 192-198.

    Li Shengyi, Wang Zhuo, Wu Yulie, et al. Prediction theory and experiment of subsurface damage based on lapping processing parameters［J］. Journal of Mechanical Engineering, 2009, 45(2): 192-198.

[28] 张银霞, 杨乐乐, 郜伟, 等. 固结磨料研磨SiC晶片亚表面损伤截面显微检测技术［J］. 人工晶体学报, 2013, 42(5): 906-910.

    Zhang Yinxia, Yang Lele, Gao Wei, et al. Cross-sectional microscopy detection technology for subsurface damage of fixed abrasive lapped SiC wafers［J］. Journal of Synthetic Crystals, 2013, 42(5): 906-910.

[29] Xu H H K, Jahanmir S. Simple technique for observing subsurface damage in machining of ceramics［J］. Journal of the American Ceramic Society, 2005, 77(5): 1388-1390.

[30] 王洪祥, 李成福, 朱本温, 等. 光学元件亚表面缺陷的损伤性检测方法［J］. 强激光与粒子束, 2014, 26(12): 129-133.

    Wang Hongxiang, Li Chengfu, Zhu Benwen, et al. Destructive methods for detecting subsurface defects of fused silica optics［J］. High Power Laser and Particle Beams, 2014, 26(12): 129-133.

[31] Helbawi H, Zhang L, Zarudi I, et al. Difference in subsurface damage in indented specimens with and without bonding layer［J］. International Journal of Mechanical Sciences, 2001, 43(4): 1107-1121.

[32] Lawn B R, Evans A G, Marshall D B. Elastic/plastic indentation damage in ceramics: The median/radial crack system［J］. Journal of the American Ceramic Society, 1980, 63(9/10): 574-581.

[33] Marshall D B, Lawn B R, Evans A G. Elastic/plastic indentation damage in ceramics: The lateral crack system［J］. Journal of the American Ceramic Society, 1982, 65(9/10): 561-566.

[34] Lambropoulos J C, Jacobs S D, Ruckman J. Material removal mechanisms from grinding to polishing［J］. Ceramic Transactions, 1999, 102: 113-128.

[35] 向勇, 任杰, 白满社, 等. 微晶玻璃研磨加工亚表面损伤深度预测方法及测量［J］. 中国激光, 2014, 41(7): 0708006.

    Xiang Yong, Ren Jie, Bai Manshe, et al. Prediction method and measurement of the depth of subsurface damage of glass-ceramic by lapping process［J］. Chinese J Lasers, 2014, 41(7): 0708006.

[36] Buijs M, Martens L A A G. Effect ofindentation interaction on cracking［J］. Journal of the American Ceramic Society, 2005, 75(10): 2809-2814.

[37] Wang Z, Wu Y, Dai Y, et al. Subsurface damage distribution in the lapping process［J］. Applied Optics, 2008, 47(10): 1417-1426.

[38] Blaineau P, Laheurte R, Darnis P, et al. Relations between subsurface damage depth and surface roughness of grinded fused silica［J］. Optics Express, 2013, 21(25): 30433-30443.

[39] 伍小燕, 于瀛洁, 吕丽军. 物体内部缺陷无损检测技术综述［J］. 激光与光电子学进展, 2013, 50(4): 040002.

    Wu Xiaoyan, Yu Yingjie, Lü Lijun. Review on non-destructive detection of inner defects of object［J］. Laser & Optoelectronics Progress, 2013, 50(4): 040002.

[40] 田欣利, 王健全, 但伟, 等. 工程陶瓷微缺陷无损检测技术的研究进展［J］. 中国机械工程, 2010(21): 2639-2645.

    Tian Xinli, Wang Jianquan, Dan Wei, et al. Progress on NDT technologies for micro-defects of engineering ceramics［J］. China Mechanical Engineering, 2010(21): 2639-2645.

[41] 刘健, 马占龙, 王君林. 光学元件亚表面损伤检测技术研究现状［J］. 激光与光电子学进展, 2011, 48(8): 081204.

    Liu Jian, Ma Zhanlong, Wang Junlin. Research status of subsurface damage detection technology of optical elements［J］. Laser & Optoelectronics Progress, 2011, 48(8): 081204.

[42] Wang J, Li Y, Han J, et al. Evaluating subsurface damage in optical glasses［J］. Journal of the European Optical Society-Rapid Publications, 2011, 6: 11001.

[43] 袁巨龙, 张飞虎, 戴一帆, 等. 超精密加工领域科学技术发展研究［J］. 机械工程学报, 2010, 46(15): 161-177.

    Yuan Julong, Zhang Feihu, Dai Yifan, et al. Development research of science and technologies in ultra-precision machining field［J］. Journal of Mechanical Engineering, 2010, 46(15): 161-177.

[44] 田爱玲, 王会婷, 党娟娟, 等. 抛光表面的亚表层损伤检测方法研究［J］. 光子学报, 2013, 42(2): 214-218.

    Tian Ailing, Wang Huiting, Dang Juanjuan, et al. A novel method for subsurface damage measurement of optical components［J］. Acta Photonica Sinica, 2013, 42(2): 214-218.

[45] Fine K R. Non-destructive real-time direct measurement of subsurface damage［C］. SPIE, 2005, 5799: 105-110.

[46] Neauport J, Cormont P, Legros P, et al. Imaging subsurface damage of grinded fused silica optics by confocal fluorescence microscopy［J］. Optics Express, 2009, 17(5): 3543-3554.

[47] Williams W B, Mullany B A, Parker W C, et al. Using quantum dots to tag subsurface damage in lapped and polished glass samples［J］. Applied Optics, 2009, 48(27): 5155-5163.

[48] Williams W B, Mullany B A, Parker W C, et al. Using quantum dots to evaluate subsurface damage depths and formation mechanisms in glass［J］. CIRP Annals-Manufacturing Technology, 2010, 59(1): 569-572.

[49] 王景贺, 张磊, 王洪祥, 等. 基于荧光共聚焦技术熔石英亚表层损伤检测方法［J］. 中国激光, 2015, 42(4): 0406004.

    Wang Jinghe, Zhang Lei, Wang Hongxiang, et al. Fused quartz subsurface damage detecting method based on confocal fluorescence microscopy［J］. Chinese J Lasers, 2015, 42(4): 0406004.

[50] 王威, 张磊, 冯素雅, 等. 采用显微荧光法研究掺钕磷酸盐激光玻璃的亚表面缺陷［J］. 中国激光, 2014, 41(9): 0906001.

    Wang Wei, Zhang Lei, Feng Suya, et al. Using fluorescence microscopy method to study subsurface defects in Nd-doped phosphate laser glasses［J］. Chinese J Lasers, 2014, 41(9): 0906001.

[51] Trost M, Herffurth T, Schmitz D, et al. Evaluation of subsurface damage by light scattering techniques［J］. Applied Optics, 2013, 52(26): 6579-6588.

[52] Wu Z, Sheehan L, Kozlowski M. Laser modulated scattering as a nondestructive evaluation tool for defect inspection in optical materials for high power laser applications［J］. Optics Express, 1998, 3(10): 376-383.

[53] Wu Z, Feit M D, Kozlowski M R, et al. Laser modulated scattering as a nondestructive evaluation tool for optical surfaces and thin film coatings［C］. SPIE, 1999, 3578: 721-729.

[54] Ma B, Shen Z X, He P F, et al. Detection of subsurface defects of fused silica optics by confocal scattering microscopy［J］. Chinese Optics Letters, 2010, 8(3): 296-299.

[55] 田爱玲, 王辉, 王春慧. 光学元件亚表面损伤的激光散射仿真研究［J］. 中国激光, 2013, 40(9): 0908006.

    Tian Ailing, Wang Hui, Wang Chunhui. Simulation research on the light-scattering properties of the subfurface damage of optical components［J］. Chinese J Lasers, 2013, 40(9): 0908006.

[56] 田爱玲, 田玉珺, 王春慧, 等. 聚焦光在亚表面损伤介质中的散射特性［J］. 强激光与粒子束, 2014, 26(9): 115-121.

    Tian Ailing, Tian Yujun, Wang Chunhui, et al. Scattering characteristics of focused light beam in medium with subsurface damage［J］. High Power Laser and Particles Beams, 2014, 26(9): 115-121.

[57] Temple P A. Total internal reflection microscopy: A surface inspection technique［J］. 1981, 20(15): 2656-2664.

[58] Sheehan L M, Kozlowski M R, Camp D W. Application of total internal reflection microscopy for laser damage studies on fused silica［C］. SPIE, 1998, 3244: 282-295.

[59] van der Bijl R J, Fhnle O W, Van B H, et al. In-process monitoring of grinding and polishing of optical surfaces［J］. Applied Optics, 2000, 39(19): 3300-3303.

[60] Fhnle O W, Wons T, Koch E, et al. iTIRM as a tool for qualifying polishing processes［J］. Applied Optics, 2002, 41(19): 4036-4038.

[61] 崔辉, 刘世杰, 赵元安, 等. 全内反射显微技术探测亚表面缺陷新方法研究［J］. 光学学报, 2014, 34(6): 0612004.

    Cui Hui, Liu Shijie, Zhao Yuanan, et al. Study on total internal reflection microscopy for subsuface damage［J］. Acta Optica Sinica, 2014, 34(6): 0612004.

[62] 许逸轩, 蒋正东, 王华林, 等. 亚表面损伤深度测量的理论研究与实验分析［J］. 激光与光电子学进展, 2016, 53(11): 111401.

    Xu Yixuan, Jiang Zhengdong, Wang Hualin, et al. Theoretical research and experimental analysis on the depth measurement of subsurface damage［J］. Laser & Optoelectronics Progress, 2016, 53(11): 111401.