扫描电子显微镜图像漂移的实时矫正方法
徐伟, 谷森, 储成智, 靳振伟, 汝长海. 扫描电子显微镜图像漂移的实时矫正方法[J]. 光电工程, 2018, 45(12): 180198.
Xu Wei, Gu Sen, Chu Chengzhi, Jin Zhenwei, Ru Changhai. Real-time correction of image drift in scanning electron microscope[J]. Opto-Electronic Engineering, 2018, 45(12): 180198.
[1] 曹耀宇,谢飞,张鹏达,等.双光束超分辨激光直写纳米加工技术 [J]. 光电工程,2017,44(12): 1135–1145.
Cao Y Y, Xie F, Zhang P D, et al. Dual-beam super-resolution direct laser writing nanofabrication technology[J]. Opto- Electronic Engineering, 2017, 44(12): 1135–1145.
[2] Gong Z, Chen B K, Sun Y, et al. Robotic Probing of Nanostructures inside Scanning Electron Microscopy[J]. IEEE Transactions on Robotics,2014,30(3): 758–765.
[3] Ye X T, Zhang Y, Ru C H, et al. Automated Pick-Place of Silicon Nanowires[J]. IEEE Transactions on Automation Science and Engineering, 2013, 10(3): 554–561.
[4] Ru C H, Zhang Y, Sun Y, et al. Automated Four-Point probe Measurement of Nanowires Inside a Scanning Electron Microscope[ J]. IEEE Transactions on Nanotechnology, 2011, 10(4): 674–681.
[5] Gong Z, Chen B K, Sun Y, et al. Fluorescence and SEM correlative microscopy for nanomanipulation of subcellular structures[ J]. Light: Science and Application, 2014, 3(11): e224.
[6] Cizmar P, Vladar A E, Postek M T. Real-Time Scanning Charged-Particle Microscope Image Composition with Correction of Drift[J]. Microscopy and Microanalysis, 2011, 17(2): 302–308.
[7] Marturi N, Demele S, Piat N. Fast Image Drift Compensation in Scanning Electron Microscope using Image Registration[C]// Proceedings of 2013 IEEE International Conference on Automation Science and Engineering, 2013: 807–812.
[8] 肖春宝,冯大政,冯祥卫. 重抽样优化的快速随机抽样一致性算 法[J]. 计算机辅助设计与图形学学报,2016,28(4): 607–613.
Xiao C B, Feng D Z, Feng X W. Fast RANSAC algorithm with resample optimization[J]. Journal of Computer-Aided Design and Computer Graphics, 2016, 28(4): 607–613.
[9] Sutton M A, Li N, Li X D. Metrology in a scanning electron microscope: theoretical developments and experimental validation[ J]. Measurement Science and Technology, 2006, 17(10): 2613–2622.
[10] Malti A C, Dembele S, Piat N, et al. Magnification-continuous static calibration model of a scanning- electron microscope[J]. Journal of Electronic Imaging, 2012, 21(3): 033020.
[11] Marturi N. Vision and visual servoing for nanomanipulation and nanocharacterization in scanning electron microscope[D]: France: Univerite De France-comte, 2013.
[12] 刘威,赵文杰,李成,等. 基于改进ORB 特征匹配的运动小目 标检测[J]. 光电工程,2015,42(10):13–20.
Liu W, Zhao W J, Li C, et al. Detecting small moving target based on the improved ORB feature matching[J]. Opto- Electronic Engineering, 2015, 42(10): 13–20.
徐伟, 谷森, 储成智, 靳振伟, 汝长海. 扫描电子显微镜图像漂移的实时矫正方法[J]. 光电工程, 2018, 45(12): 180198. Xu Wei, Gu Sen, Chu Chengzhi, Jin Zhenwei, Ru Changhai. Real-time correction of image drift in scanning electron microscope[J]. Opto-Electronic Engineering, 2018, 45(12): 180198.