扫描电子显微镜图像漂移的实时矫正方法

为解决扫描电子显微镜(SEM)由于电子束漂移、电磁干扰等原因导致的图像漂移问题，提出基于ORB 结合PROSAC 的图像漂移矫正算法。首先采用ORB 算法对基准图像和实时图像进行特征检测，然后利用汉明距离与交叉匹配实现特征的初匹配，再结合RANSAC 的优化算法PROSAC 计算帧间的单应矩阵，利用单应矩阵映射剔除外点后重新迭代计算出最终的精确单应矩阵，最后利用单应矩阵的透视变换实现SEM 图像漂移实时矫正。通过实验证明，该算法不仅精度高，而且能够满足SEM 实时处理的要求。

Abstract

In order to solve the problem of imaging drift in scanning electron microscope (SEM) that caused by electron beam drift, electromagnetic interference and other reasons, an image shift correction algorithm based on ORB (oriented FAST and rotated BRIEF) combing the PROSAC (progressive sample consensus) is proposed in this paper. Firstly, the ORB algorithm is used to detect the feature between the reference image and real-time image. Then the initial matching of the feature is implemented by using the Hamming distance and cross-matching. Moreover, the RANSAN (random sample consensus) optimization algorithm PROSAC is used to calculate the homography matrix between frames and the final exact homography matrix is re-iterated after eliminating exterior point. Finally, the SEM image drift is corrected in real time using the perspective transformation of the homography matrix. The experiments show that the proposed algorithm is high precision and satisfies the requirement of SEM real-time processing.

参考文献

[1] 曹耀宇，谢飞，张鹏达，等.双光束超分辨激光直写纳米加工技术 [J]. 光电工程，2017，44(12): 1135–1145.

Cao Y Y, Xie F, Zhang P D, et al. Dual-beam super-resolution direct laser writing nanofabrication technology[J]. Opto- Electronic Engineering, 2017, 44(12): 1135–1145.

[2] Gong Z, Chen B K, Sun Y, et al. Robotic Probing of Nanostructures inside Scanning Electron Microscopy[J]. IEEE Transactions on Robotics，2014，30(3): 758–765.

[3] Ye X T, Zhang Y, Ru C H, et al. Automated Pick-Place of Silicon Nanowires[J]. IEEE Transactions on Automation Science and Engineering, 2013, 10(3): 554–561.

[4] Ru C H, Zhang Y, Sun Y, et al. Automated Four-Point probe Measurement of Nanowires Inside a Scanning Electron Microscope[ J]. IEEE Transactions on Nanotechnology, 2011, 10(4): 674–681.

[5] Gong Z, Chen B K, Sun Y, et al. Fluorescence and SEM correlative microscopy for nanomanipulation of subcellular structures[ J]. Light: Science and Application, 2014, 3(11): e224.

[6] Cizmar P, Vladar A E, Postek M T. Real-Time Scanning Charged-Particle Microscope Image Composition with Correction of Drift[J]. Microscopy and Microanalysis, 2011, 17(2): 302–308.

[7] Marturi N, Demele S, Piat N. Fast Image Drift Compensation in Scanning Electron Microscope using Image Registration[C]// Proceedings of 2013 IEEE International Conference on Automation Science and Engineering, 2013: 807–812.

[8] 肖春宝，冯大政，冯祥卫. 重抽样优化的快速随机抽样一致性算法[J]. 计算机辅助设计与图形学学报，2016，28(4): 607–613.

Xiao C B, Feng D Z, Feng X W. Fast RANSAC algorithm with resample optimization[J]. Journal of Computer-Aided Design and Computer Graphics, 2016, 28(4): 607–613.

[9] Sutton M A, Li N, Li X D. Metrology in a scanning electron microscope: theoretical developments and experimental validation[ J]. Measurement Science and Technology, 2006, 17(10): 2613–2622.

[10] Malti A C, Dembele S, Piat N, et al. Magnification-continuous static calibration model of a scanning- electron microscope[J]. Journal of Electronic Imaging, 2012, 21(3): 033020.

[11] Marturi N. Vision and visual servoing for nanomanipulation and nanocharacterization in scanning electron microscope[D]: France: Univerite De France-comte, 2013.

[12] 刘威，赵文杰，李成，等. 基于改进ORB 特征匹配的运动小目标检测[J]. 光电工程，2015，42(10)：13–20.

Liu W, Zhao W J, Li C, et al. Detecting small moving target based on the improved ORB feature matching[J]. Opto- Electronic Engineering, 2015, 42(10): 13–20.

徐伟, 谷森, 储成智, 靳振伟, 汝长海. 扫描电子显微镜图像漂移的实时矫正方法[J]. 光电工程, 2018, 45(12): 180198. Xu Wei, Gu Sen, Chu Chengzhi, Jin Zhenwei, Ru Changhai. Real-time correction of image drift in scanning electron microscope[J]. Opto-Electronic Engineering, 2018, 45(12): 180198.

扫描电子显微镜图像漂移的实时矫正方法

关于本站 Cookie 的使用提示

全站搜索

扫描电子显微镜图像漂移的实时矫正方法

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索