光学学报, 2011, 31 (11): 1131001, 网络出版: 2011-10-12
Mo/Si软X射线多层膜中厚度均匀性的精细控制
Precise Control of Thickness Uniformity in Mo/Si Soft X-Ray Multilayer
补充材料
朱亚丹, 方明, 易葵. Mo/Si软X射线多层膜中厚度均匀性的精细控制[J]. 光学学报, 2011, 31(11): 1131001. Zhu Yadan, Fang Ming, Yi Kui. Precise Control of Thickness Uniformity in Mo/Si Soft X-Ray Multilayer[J]. Acta Optica Sinica, 2011, 31(11): 1131001.