多波长表面形貌测量系统中波长校准方法
杨练根, 杨光明, 王选择. 多波长表面形貌测量系统中波长校准方法[J]. 光学技术, 2018, 44(3): 300.
YANG Liangen, YANG Guangming, WANG Xuanze. The wavelength calibration method for multi-wavelength surface topography measurement system[J]. Optical Technique, 2018, 44(3): 300.
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杨练根, 杨光明, 王选择. 多波长表面形貌测量系统中波长校准方法[J]. 光学技术, 2018, 44(3): 300. YANG Liangen, YANG Guangming, WANG Xuanze. The wavelength calibration method for multi-wavelength surface topography measurement system[J]. Optical Technique, 2018, 44(3): 300.
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