640×512偏振长波量子阱红外焦平面探测器研制

周旭昌; 李东升; 木迎春; 铁筱滢; 王晓娟; 陈卫业

doi:doi:10.3788/irla201746.0104004

红外与激光工程, 2017, 46 (1): 0104004, 网络出版: 2017-03-29

640×512偏振长波量子阱红外焦平面探测器研制

Study on 640×512 polarimetric LWIR QWIP FPA

论文大纲

周旭昌 ^*李东升木迎春铁筱滢王晓娟陈卫业

作者单位

昆明物理研究所, 云南昆明 650223

偏振长波红外探测大面阵量子阱焦平面组件单片集成 polarimetric LWIR detection large format QWIP FPA assembly single-chip integration

摘要

介绍了大面阵偏振长波量子阱红外焦平面探测器组件的研制进展。在640×512规模20 μm中心距面阵上, 偏振焦平面采用了2×2子单元设计, 子单元中每个像元分别刻蚀0°、 90°、 45° 以及135°方向的一维线性光栅, 来获得入射光不同偏振角度的信息。突破了长波量子阱材料外延和器件制备等关键技术, 制备出面阵探测器芯片, 实现了偏振长波红外探测的单片集成, 配上杜瓦和制冷机, 研制出噪声等效温差优于30 mK的长波偏振640×512量子阱探测器组件。

Abstract

The development of the large format polarimetric LWIR quantum well infrared FPA. The 20 μm pitch, 640×512 array was divided into 2×2 unit cells. Each pixel in the unit cell was etched a 1D lamellar grating on it, with four different orientations of 0°, 90°, 45° and 135°, to get the polarimetric information of the incidence irradiation. Based on the QWIP FPA key technologies such as quantum well material epitaxy and chip preparation, the single-chip integration with LWIR and the polarization detection function was realized on the QWIP FPA. The 640×512 polarimetric LWIR QWIP FPA assembly with noise equivalent temperature difference (NETD) better than 30 mK was obtained with the integration the FPA chip with the Dewar and the sterling cooler.

参考文献

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周旭昌, 李东升, 木迎春, 铁筱滢, 王晓娟, 陈卫业. 640×512偏振长波量子阱红外焦平面探测器研制[J]. 红外与激光工程, 2017, 46(1): 0104004. Zhou Xuchang, Li Dongsheng, Mu Yingchun, Tie Xiaoying, Wang Xiaojuan, Chen Weiye. Study on 640×512 polarimetric LWIR QWIP FPA[J]. Infrared and Laser Engineering, 2017, 46(1): 0104004.

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