四环谐振腔结构中耦合诱导透明特性研究

崔丹凤; 谢成峰; 刘耀英; 李艳娜; 韦丽萍; 王永华; 刘俊; 薛晨阳

doi:doi:10.3788/gzxb20144305.0523002

光子学报, 2014, 43 (5): 0523002, 网络出版: 2014-06-03

四环谐振腔结构中耦合诱导透明特性研究

Research on Coupled Resonator Induced Transparency in Fourth-order Microring Resonator

论文大纲

崔丹凤 ^1,2,*谢成峰 ¹刘耀英 ²李艳娜 ²韦丽萍 ¹王永华 ²刘俊 ^1,2薛晨阳 ^1,2

作者单位

¹ 中北大学仪器科学与动态测试教育部重点实验室

² 中北大学电子测试技术重点实验室，太原 030051

摘要

基于量子相干效应中的电磁诱导透明，设计了一种四环级联谐振腔结构，并对其产生的耦合诱导透明现象进行了理论分析.利用时域有限差分法和束传输法对结构的关键参量进行了仿真模拟，采用电子束光刻与感应耦合等离子刻蚀工艺相结合的方式完成了结构的加工制备.实验中利用垂直光栅耦合法对结构进行测试，测试结果表明：由于相消干涉，该结构可以引起一个狭窄的透明峰；每个环形腔之间相互干涉，产生了两个透射峰，从而实现对光传输的延迟，其中一个透射谱半高全宽为0.022 nm，对应的品质因数为0.72×105，且两个谐振峰之间的距离相隔0.084 nm.波导直通端与下载端的谐振谱线吻合，与理论分析相符.

Abstract

A fourth-order microring resonator structure was designed based on quantum coherence effects of electromagnetic induced transparency. Coupled-resonator-induced-transparency phenomenon which produced in resonator was analyzed theoretically. Key parameters of structures were simulated by Finite Difference Time Domain Method and Beam Propagation Method. The ring resonators were fabricated with electron beam lithography and the induction coupled plasma etching process. The structure was tested by vertical grating coupling method , the results show that a narrow transparent peak was obtained which is caused by interference due to phase elimination. Optical transmission delay is realized by two transmission peaks which are generated from mutual interference among ring resonators and one of the transmission spectrum full width at half maximum is 0.022 nm. This structure can achieve high quality factor (Q=0.72×105), and the distance between the two resonance peaks separated by 0.084 nm. The through port and drop port transmission spectra are coincided well with each other which excellent agree with the theoretical analysis.

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崔丹凤, 谢成峰, 刘耀英, 李艳娜, 韦丽萍, 王永华, 刘俊, 薛晨阳. 四环谐振腔结构中耦合诱导透明特性研究[J]. 光子学报, 2014, 43(5): 0523002. CUI Dan-feng, XIE Cheng-feng, LIU Yao-ying, LI Yan-na, WEI Li-ping, WANG Yong-hua, LIU Jun, XUE Chen-yang. Research on Coupled Resonator Induced Transparency in Fourth-order Microring Resonator[J]. ACTA PHOTONICA SINICA, 2014, 43(5): 0523002.

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