激光与光电子学进展, 2020, 57 (23): 232301, 网络出版: 2020-11-25
基于石墨烯等离子体的宽带透射式红外光调制器 
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Broadband Transmission Infrared Light Modulator Based on Graphene Plasma
图 & 表
图 1. 石墨烯硅基双层金属光栅红外光调制器结构图。(a)三维立体图;(b)剖面图
Fig. 1. Diagrams of Si-based double layer metal grating infrared light modulator based on graphene. (a) Three-dimensional diagram; (b) cross-section diagram
图 2. 有、无铝层覆盖的调制器的透射率谱线。无铝层覆盖的调制器在(a)TM入射光和(b)TE入射光下不同费米能级的透射率谱线;有铝层覆盖的调制器在(c)TM入射光和(d)TE入射光下不同费米能级的透射率谱线;(e)有/无铝层覆盖时,共振峰的FWHM随费米能级的变化
Fig. 2. Transmission spectra of modulators without and with Al film on top. Transmission spectra of modulator without Al film on top for (a) TM incident light and (b) TE incident light under different Fermi levels; transmission spectra of modulator with Al film on top for (c) TM incident light and (d) TE incident light under different Fermi levels; (e) FWHM of resonant peak versus Fermi level with or without Al film
图 3. 有、无铝层覆盖结构的电场分布图。(a)无铝层覆盖结构在费米能级Ef=0.3 eV、共振波长λ=18.5 μm时的电场分布图;(b)无铝层覆盖结构在费米能级Ef=0.3 eV、波长λ=7 μm(远离共振峰)时的电场分布图;(c)有铝层覆盖结构在费米能级Ef=0.3 eV、共振波长λ=13.5 μm时的电场分布图;(d)有铝层覆盖结构在费米能级Ef=0.3 eV、波长λ=7 μm(远离共振峰)时的电场分布图
Fig. 3. Distributions of electric field of structures with and without Al film on top. (a) Electric field of structure without Al film on top when Fermi level Ef=0.3 eV and resonant wavelength λ=18.5 μm; (b) electric field of structure without Al film on top when Fermi level Ef=0.3 eV and λ=7 μm (away from the resonance peak); (c) electric field of structure with Al film on top when Fermi level Ef=0.3 eV and resonant wavelength λ
图 4. 不同结构参数对所提结构性能的影响。(a) W=110 nm、H2=50 nm、P=150 nm时,TM光的透射率随H1的变化; (b) H1=700nm、 H2=50 nm、P=150 nm时,TM光的透射率随W的变化;(c) H1=700nm、W=110 nm、 P=150 nm时,TM光的透射率随H2的变化;(d) H1=700nm、W=110 nm、H2=50 nm时,TM光的透射率随光栅周期P的变化
Fig. 4. Influences of structural parameters on properties of proposed structure. (a) Transmissivity of TM light varying with H1 when W=110 nm, H2=50 nm, and P=150 nm; (b) transmissivity of TM light varying with W when H1=700nm, H2=50 nm, and P=150 nm; (c) transmissivity of TM light varying with H2 when H1=700nm, W=110 nm, and P=150 nm; (d) transmissivity o
袁志豪, 徐俞, 曹冰, 王钦华. 基于石墨烯等离子体的宽带透射式红外光调制器[J]. 激光与光电子学进展, 2020, 57(23): 232301. Zhihao Yuan, Yu Xu, Bing Cao, Qinhua Wang. Broadband Transmission Infrared Light Modulator Based on Graphene Plasma[J]. Laser & Optoelectronics Progress, 2020, 57(23): 232301.
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