一种新型静电驱动二维微型扫描镜的设计及模态
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刘耀波, 苑伟政, 乔大勇, 杨璇, 梁晓伟, 练彬. 一种新型静电驱动二维微型扫描镜的设计及模态[J]. 光学学报, 2013, 33(6): 0623001. Liu Yaobo, Yuan Weizheng, Qiao Dayong, Yang Xuan, Liang Xiaowei, Lian Bin. Design and Modes of a Novel Two-Dimensional Microscanner with Electrostatic Actuation[J]. Acta Optica Sinica, 2013, 33(6): 0623001.