一种紫外焦平面探测器电流响应率测试方法

邵秀梅; 丁洁莹; 陈新禹; 张燕; 方家熊

光学学报, 2009, 29 (s1): 242, 网络出版: 2009-06-25

一种紫外焦平面探测器电流响应率测试方法

A Test Method for Current Responsivity of UV FPA Detector

论文大纲

邵秀梅 ^1,2,*丁洁莹 ¹陈新禹 ¹张燕 ¹方家熊 ¹

作者单位

¹ 中国科学院上海技术物理研究所传感技术国家重点实验室, 上海 200083

² 中国科学院研究生院, 北京 100049

探测器紫外焦平面测试电流响应率 detectors ultraviolet focal plane array measurement current responsivity

摘要

电流响应率是紫外探测器的重要特性参数, 光敏芯片与读出电路芯片耦合成焦平面组件后, 不能通过测试焦平面组件直接得到电流响应率参数。对128×1 电容反馈互阻抗放大器(CTIA)读出电路芯片进行了系统的测试, 得到了读出电路的积分电容、源随器增益。同时, 采用自研的紫外探测器高精度定标测试系统, 分别对128×1铝镓氮(AlGaN)紫外探测器光敏芯片、128×1紫外焦平面探测器组件进行测试, 求得了从焦平面探测器推算电流响应率的方法。结果表明, 直接标定光敏芯片的电流响应率与测试焦平面组件间接推算的电流响应率基本一致, 相对偏差约5%。该方法简便、准确, 可以为综合评价紫外焦平面探测器的性能提供重要参数。

Abstract

Current responsivity is an important characteristic of UV detector which cannot be measured directly after the coupling between detector array and readout integrated circuit (ROIC) chip. It’s very significant on the measurement for current responsivity of UV Focal plane array (FPA) detector. The 128×1 ROIC chip were measured. The integration capacitance and gain of source follower of ROIC chip were analyzed. Then, 128×1 AlGaN photosensitive chip and 128×1 UV FPA detector were tested by using a special system which was developed independently for high-accuracy measurement of UV detector. An indirect test method for current resposivity of UV FPA detector was studied and set up. The current responsivities by testing photosensitive chip directly were basically consistent with those by testing UV FPA indirectly. The relative deviation is about 5%. This test method is very easy and reliable, so can provide significant parameters to the comprehensive evaluation of UV FPA.

参考文献

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邵秀梅, 丁洁莹, 陈新禹, 张燕, 方家熊. 一种紫外焦平面探测器电流响应率测试方法[J]. 光学学报, 2009, 29(s1): 242. Shao Xiumei, Ding Jieying, Chen Xinyu, Zhang Yan, Fang Jiaxiong. A Test Method for Current Responsivity of UV FPA Detector[J]. Acta Optica Sinica, 2009, 29(s1): 242.

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