场发射冷阴极微栅孔阵列制备技术
[1] Whaley D R, Gannon B M, Smith C R, et al. Application of field emitter arrays to microwave power amplifier[J]. IEEE Trans on Plasma Sci, 1996, 28(3):727-747.
[2] Marrese C M. A review of field emission cathode technologies for electric propulsion systems and instruments[C]//Proceeding of IEEE Aerospace Conference. 2000, 4:85-98.
[3] Ives R L. Microfabrication of high-frequency vacuum electron devices[J]. IEEE Trans on Plasma Sci, 2004, 32(3):1277-1291.
[4] Schwoebel P R, Spindt C A, Holland C E. High current, high current density field emitter array cathodes[J]. J Vac Sci Technol B, 2005,23(2):591-693.
[5] Spindt C A, Holland C E, Schwoebel P R. A reliable improved Spindt cathode design for high currents[C]//Proceeding of IEEE International Vacuum Electronics Conference (IVEC). 2010.
[6] Bernhardt A F, Contolini R J, Jankowski A F, et al. Arrays of field emission cathode structures with sub-300 nm gates[J]. J Vac Sci Technol B, 2000, 18(3):1212-1215.
[7] Mochizuki Y, Fujii M, Hayashi S, et al. Enhancement of photoluminescence from silicon nanocrystals by metal nanostructures made by nanosphere lithography[J]. J Appl Phys, 2009, 106:013517.
[8] Cheung C L, NikoliС R J, Reinhardt C E, et al. Fabrication of nanopillars by nanosphere lithography[J]. Nanotechnology, 2006, 17:1339-1343.
[9] Li K H, Choi H W. Air-spaced GaN nanopillar photonic band gap structures patterned by nanosphere lithography[J]. J Appl Phys , 2011, 109: 023107.
[10] Whaley D R, Gannon B M, Heinen V O, et al. Experimental demonstration of an emission-gated traveling-wave tube amplifier[J]. IEEE Trans on Plasma Sci, 2002, 30(3):988-1008.
赵兴海, 施志贵, 向伟, 金大志, 钱沐杨, 苏伟, 李男男, 朱锦锋. 场发射冷阴极微栅孔阵列制备技术[J]. 强激光与粒子束, 2013, 25(6): 1475. Zhao Xinghai, Shi Zhigui, Xiang Wei, Jin Dazhi, Qian Muyang, Su Wei, Li Nannan, Zhu Jinfeng. Fabrication of micro-hole array for field emission cold cathode gates[J]. High Power Laser and Particle Beams, 2013, 25(6): 1475.