为了研究硬质合金表面激光微织构工艺对膜-基结合性能的影响,利用光纤激光对硬质合金表面进行了微织构造型(不同微凹坑直径、深度及密度),并选用PVD工艺利用超高真空多功能的磁控溅射系统对硬质合金织构后的表面进行TiAlN涂层的沉积;采用HXD-1000TMSC/LCD 显微硬度计测定了涂层表面的显微硬度;应用X-350A X射线应力测定仪检测了基体织构后的表面残余应力以及涂层后试样截面的残余应力。研究结果表明: 硬质合金基体激光微织构处理对涂层表面的显微硬度具有一定的影响,其中织构密度对显微硬度的影响较大;硬质合金表面激光微织构会在基体上引入残余拉应力,凹坑间距对残余应力影响很小,而织构密度对残余应力的影响较大。

In order to study the laser surface micro texturing process and its influence on the bonding properties of the film-based, using the fiber laser on the cemented carbide surface to make the micro texture modeling (the micro dimple with different diameter, different depth and different density), choosing the PVD method to deposite the TiAlN coating on the cemented carbide with Ultra high vacuum multifunctional magnetron sputtering system; measuring the microhardness on the surface of the coating by the HXD-1000TMSC/LCD microhardness tester; using the X-350 A X-Ray stress analyze to test the surface residual stress after the micro-textured substrate and the section of the residual stress after the coating. The research shows that: the laser micro-texture of the cemented carbide substrates has influence on the micro hardness of the coating surface, and the texture density has greater influence on the micro hardness; The laser micro texture of the cemented carbide surface produced the residual stress on the substrate, the distance of the pits has little effect on the residual stress, but the texture density has greater impact on it.