Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process

Xin Guo; Jinbin Ding; Yi Zhou; Yu Wang

doi:doi:10.1017/hpl.2018.2

High Power Laser Science and Engineering, 2018, 6 (1): 010000e9, Published Online: Jul. 4, 2019

Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process Download： 543次

Xin Guo ^1,2Jinbin Ding ^1,2,†Yi Zhou ^1,2Yu Wang ^1,2

Author Affiliations

¹ Academy of Opto-Electronics, Chinese Academy of Sciences, Beijing 100094, China

² Beijing Excimer Laser Technology and Engineering Center, Beijing 100094, China

Figures & Tables

Fig. 1. The morphology of the corroded anode. (a) Surface morphology by OM. (b) Surface morphology by SEM. (c) Subsurface morphology by SEM.

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Fig. 2. (a) The cross section morphology and (b) C, (c) O, (d) F, (e) Cu, (f) Al element distributions of the corroded anode.

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Fig. 3. The surface morphologies of the corroded cathode by (a) OM and (b) SEM.

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Fig. 4. (a) The cross section morphology and (b) C, (c) O, (d) F, (e) Cu, (f) Zn element distributions of the corroded cathode.

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Fig. 5. The morphologies of (a) the flakes generated by the anode and (b) the particles generated by the cathode.

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Fig. 6. The trace elements distribution of a copper part. (a) Surface content ${>}$50 ppm. (b) Surface content ${<}$50 ppm.

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Fig. 7. The distribution diagram of reaction layers and elements of the corroded electrodes.

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Xin Guo, Jinbin Ding, Yi Zhou, Yu Wang. Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process[J]. High Power Laser Science and Engineering, 2018, 6(1): 010000e9.

Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process Download： 543次

Fig. 1. The morphology of the corroded anode. (a) Surface morphology by OM. (b) Surface morphology by SEM. (c) Subsurface morphology by SEM.

Fig. 2. (a) The cross section morphology and (b) C, (c) O, (d) F, (e) Cu, (f) Al element distributions of the corroded anode.

Fig. 3. The surface morphologies of the corroded cathode by (a) OM and (b) SEM.

Fig. 4. (a) The cross section morphology and (b) C, (c) O, (d) F, (e) Cu, (f) Zn element distributions of the corroded cathode.

Fig. 5. The morphologies of (a) the flakes generated by the anode and (b) the particles generated by the cathode.

Fig. 6. The trace elements distribution of a copper part. (a) Surface content ${>}$50 ppm. (b) Surface content ${<}$50 ppm.

Fig. 7. The distribution diagram of reaction layers and elements of the corroded electrodes.

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Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process Download： 543次

Fig. 1. The morphology of the corroded anode. (a) Surface morphology by OM. (b) Surface morphology by SEM. (c) Subsurface morphology by SEM.

Fig. 2. (a) The cross section morphology and (b) C, (c) O, (d) F, (e) Cu, (f) Al element distributions of the corroded anode.

Fig. 3. The surface morphologies of the corroded cathode by (a) OM and (b) SEM.

Fig. 4. (a) The cross section morphology and (b) C, (c) O, (d) F, (e) Cu, (f) Zn element distributions of the corroded cathode.

Fig. 5. The morphologies of (a) the flakes generated by the anode and (b) the particles generated by the cathode.

Fig. 6. The trace elements distribution of a copper part. (a) Surface content ${>}$50 ppm. (b) Surface content ${<}$50 ppm.

Fig. 7. The distribution diagram of reaction layers and elements of the corroded electrodes.

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