High Power Laser Science and Engineering, 2018, 6 (1): 010000e9, Published Online: Jul. 4, 2019
Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process Download: 543次
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Xin Guo, Jinbin Ding, Yi Zhou, Yu Wang. Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process[J]. High Power Laser Science and Engineering, 2018, 6(1): 010000e9.