光学面形绝对测量方法仿真和实验研究 
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Simulation and Experimental Study of Absolute Measurement Method for Optical Surface
1 南京理工大学电子工程与光电技术学院, 江苏 南京 210094
2 中国科学院上海光学精密机械研究所强激光材料重点实验室, 上海 201800
图 & 表
图 1. N位旋转平均检测法测量原理
Fig. 1. Measurement principle of N bit rotation average detection method
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图 2. 斜入射迭代绝对检测法测量原理
Fig. 2. Measurement principle of oblique incidence iteration absolute detection method
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图 3. 仿真实验所使用的初始面形。(a) A;(b) B;(c) C
Fig. 3. Initial surfaces used in simulation experiment. (a) A; (b) B; (c) C
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图 4. N位旋转平均法得到的仿真结果。(a) A;(b) B;(c) C
Fig. 4. Simulation results obtained by N bit rotation average method. (a) A; (b) B; (c) C
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图 5. N位旋转平均法恢复波面与原始波面的残差。(a) A;(b) B;(c) C
Fig. 5. Residual data between the wavefront recovered by N bit rotation average method and original wavefront. (a) A; (b) B; (c) C
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图 6. 斜入射迭代绝对检测法得到的仿真结果。(a) K;(b) M;(c) L
Fig. 6. Simulation results obtained by oblique incidence iteration absolute detection method. (a) K; (b) M; (c) L
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图 7. 斜入射迭代绝对检测法恢复波面与原始波面的残差。(a) K;(b) M;(c) L
Fig. 7. Residual data between the wavefront recovered by oblique incidence iteration absolute detection method and original wavefront. (a) K; (b) M; (c) L
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图 8. 斜入射奇偶函数绝对检测法得到的仿真结果。(a) K;(b) M;(c) L
Fig. 8. Simulation results obtained by oblique incidence odd oven function absolute detection method. (a) K; (b) M; (c) L
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图 9. 斜入射奇偶函数绝对检测法恢复波面与原始波面的残差。(a) K;(b) M;(c) L
Fig. 9. Residual data between the wavefront recovered by oblique incidence odd oven function absolute detection method and original wavefront. (a) K; (b) M; (c) L
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图 10. N位旋转绝对检测实验装置图
Fig. 10. Experimental setup for N bit rotation absolute detection
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图 11. N位旋转平均法得到的标准镜A的面形结果
Fig. 11. Surface result of standard mirror A obtained by N bit rotation average method
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图 12. 斜入射绝对检测实验装置图
Fig. 12. Experimental setup for oblique incidence absolute detection
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图 13. 不同方法得到的L的面形结果。(a)迭代法;(b)奇偶函数法
Fig. 13. Surface results of L obtained by different methods. (a) Iteration method; (b) odd oven function method
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图 14. 标准镜A的相对面形测量结果
Fig. 14. Relative surface measurement result of standard mirror A
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表 1初始面形的PV和RMS数据
Table1. PV and RMS data of the initial surfaces
| Surface | A | B | C |
|---|
| PV /λ | 0.042587 | 0.046494 | 0.043457 | | RMS /nm | 4.9632 | 5.1474 | 4.1835 |
|
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表 2N位旋转平均法恢复的面形的PV和RMS数据
Table2. PV and RMS data of the recovered surfaces obtained by N bit rotation average method
| Surface | A | B | C |
|---|
| PV /λ | 0.043511 | 0.048728 | 0.043658 | | RMS /nm | 4.9382 | 5.1183 | 4.1323 |
|
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表 3斜入射迭代绝对检测法恢复面形的PV和RMS数据
Table3. PV and RMS data of the recovered surfaces obtained by oblique incidence iteration absolute detection method
| Surface | K | M | L |
|---|
| PV /λ | 0.038772 | 0.050428 | 0.043772 | | RMS /nm | 4.2616 | 5.236 | 4.1736 |
|
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表 4斜入射奇偶函数绝对检测法恢复面形的PV和RMS数据
Table4. PV and RMS data of the recovered surfaces obtained by oblique incidence odd oven function absolute detection method
| Surface | K | M | L |
|---|
| PV /λ | 0.038772 | 0.050428 | 0.031388 | | RMS /nm | 4.2616 | 5.236 | 2.7548 |
|
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表 5不同方法得到的标准镜A的面形的PV和RMS数据
Table5. PV and RMS data of the surface of standard mirror A obtained by different methods
| Method | N bit rotation average method | Iteration method | Odd oven function method | Relative measurement |
|---|
| PV /λ | 0.025 | 0.030 | 0.023 | 0.038 | | RMS /nm | 3.246 | 3.917 | 2.986 | 5.768 |
|
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孟诗, 刘世杰, 陈磊, 周游, 白云波. 光学面形绝对测量方法仿真和实验研究[J]. 激光与光电子学进展, 2018, 55(5): 051201. Shi Meng, Shijie Liu, Lei Chen, You Zhou, Yunbo Bai. Simulation and Experimental Study of Absolute Measurement Method for Optical Surface[J]. Laser & Optoelectronics Progress, 2018, 55(5): 051201.
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