激光与光电子学进展, 2020, 57 (11): 111431, 网络出版: 2020-06-02
基于空间光调制器的超快激光加工原理及应用 
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Principles and Applications of Ultrafast Laser Processing Based on Spatial Light Modulators
图 & 表
图 1. 空间光调制器原理示意图。(a) DMD原理图[15];(b)液晶空间光调制器示意图,无电压(左)和电压高于阈值(右)[17]
Fig. 1. Schematics of spatial light modulators. (a) Principle of DMD[15]; (b) diagrams of LC-SLM without voltage (left) and with applied voltage higher than threshold (right)[17]
图 4. 激光加工时产生像差的示意图。(a)激光聚焦到样品内部引入球差的示意图[47];(b)激光靠近样品边缘时引入像差的示意图[48]
Fig. 4. Schematics of aberrations induced during laser fabrication. (a) Spherical aberration induced when laser is focused into sample[47]; (b) aberration induced when laser is close to sample edge[48]
图 5. 基于SLM的像差校正。(a)利用超快激光在金刚石和熔融石英内部加工出的螺旋状光斑点阵在像差校正前后的对比图[47];(b) 利用超快激光加工得到的光纤布拉格光栅的像差校正前(右)、后(左)对比图[52];(c) 利用全息技术校正前后不同深度处的结果,其中,每一列分别为不同深度处加工的结果(依次为0.5 mm、1 mm以及经过石英玻璃后0.5 mm、1 mm表面以下),左边是未校正的结果,右边是校正后的结果[54];(d)像差校正前后加工出的光波导对比图,左上图为未经校正像差加工的结果,右上图为像差校正后加工的结果,左下图为像差校正后加工出的光波导横截面图,右下图为光波导在s偏振和p偏振光束下的近场模式图[53Fig. 5. Aberration correction based on SLM. (a) Comparison of helical spot arrays fabricated by ultrafast laser machining in diamond and fused silica before and after aberration compensation[47]; (b) comparison of fiber Bragg grating structures fabricated by ultrafast laser machining before (right) and after (left) aberration compensation[52]; (c) results at different depths of structures fabricated by ho
Fig. 5. Aberration correction based on SLM. (a) Comparison of helical spot arrays fabricated by ultrafast laser machining in diamond and fused silica before and after aberration compensation[47]; (b) comparison of fiber Bragg grating structures fabricated by ultrafast laser machining before (right) and after (left) aberration compensation[52]; (c) results at different depths of structures fabricated by ho
图 6. 基于空间光调制器的超快激光并行加工系统[57]
Fig. 6. Schematic of ultrafast laser parallel processing system based on spatial light modulator[57]
图 7. 基于SLM的多焦点并行加工。(a) 利用多焦点并行加工技术加工的字母点阵图案光学显微镜图像[57];(b)利用4焦点(左)、6焦点(右)扫描技术加工出的3维细胞培养基底的扫描电镜图像[59]
Fig. 7. Multi-focus parallel machining based on SLM. (a) Optical microscope image of character dot array fabricated with multi-focus parallel machining technique[57]; (b) SEM images of 3D cell culture substrates fabricated by 4-focus scan (left) and 6-focus scan (right) techniques[59]
图 8. 基于SLM多焦点并行加工的多维光存储应用。(a)利用多焦点阵列实现5维永久光存储数据的写入[61];(b)基于德拜衍射理论得到的经像差校正后的三维多焦点阵列[35]
Fig. 8. Multi-dimensional optical data storage applications based on SLM multi-focus parallel writing. (a) Five-dimensional permanent optical storage data recording by multi-focus array[61]; (b) 3D multi-focus array generated based on Debye diffraction theory after aberration compensation[35]
图 9. 单次曝光或扫描加工出的三维结构。(a)通过对焦点光场进行三维调控打印出的三维结构的SEM图:单次曝光(左)、单次扫描(中)、利用单次曝光和单次扫描相结合(右)[12];(b)利用空间光调制器单次曝光加工出的三维双螺旋结构[64]
Fig. 9. Three-dimensional structures produced by single exposure or scanning. (a) SEM images of 3D microstructures printed by 3D adjustment for focusing light field: single-exposure (left), single-scan (middle), and single-exposure & single-scan (right)[12]; (b) 3D double-helix structures fabricated by single-exposure based on SLM[64]
图 10. 超快激光时空同步聚焦并行加工。(a)超快激光时空同步聚焦并行加工的光路示意图[66];(b)由图10 (a)中系统生成的三维多焦点阵列及其加工结果[66];(c)基于DMD的超快激光时空同步聚焦并行加工出的复杂三维结构[67]
Fig. 10. Ultrafast laser simultaneous spatial and temporal focusing (SSTF) parallel processing. (a) Schematic of light path of ultrafast laser simultaneous spatial and temporal focusing (SSTF) parallel processing[66]; (b) 3D multifocal array generated by system in Fig. 10 (a) and processing results[66]; (c) complex 3D structures printed by DMD based ultrafast laser SSTF
图 11. 使用SLM生成的结构光场。(a)通过在空间光调制器不同区域反射两次,生成了16种不同的结构光场[71];(b)利用空间光调制器得到16个不同矢量分布的光束阵列[73]
Fig. 11. Structured light field generated by SLM. (a) 16 kinds of structured light fields generated by double reflection of SLM[71]; (b) 16-vector-Bessel-beam-array generated by SLM[73]
图 12. 结构光场的应用。(a)利用空间光调制器进行超衍射并行存储原理图[75];(b)利用双涡旋光束叠加得到的开口环结构[76];(c)对涡旋光的相位因子进行调控得到的不同的微结构[77];(d)利用贝塞尔光束和马蒂厄光束加工出的微笼结构[79]
Fig. 12. Applications of structured light fields. (a) Schematic of super-diffraction parallel storage based on SLMs[75]; (b) split-ring structure fabricated by two vortex beams[76]; (c) microstructures fabricated by controlling phase factor of vortex beam[77]; (d) microcages fabricated by using Bessel and Mathieu beams[7
刘思垣, 张静宇. 基于空间光调制器的超快激光加工原理及应用[J]. 激光与光电子学进展, 2020, 57(11): 111431. Siyuan Liu, Jingyu Zhang. Principles and Applications of Ultrafast Laser Processing Based on Spatial Light Modulators[J]. Laser & Optoelectronics Progress, 2020, 57(11): 111431.
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