光学学报, 2020, 40 (6): 0631001, 网络出版: 2020-03-06 复制并引用该论文  本文已被引 6 次  被引通知

图 & 表

图 1. 高纯单晶金刚石、微掺氮单晶金刚石和参照样品的紫外可见吸收光谱。(a)高纯单晶金刚石;(b)微掺氮单晶金刚石;(c)参照样品

Fig. 1. UV-visible absorption spectra of three kinds of single crystal diamonds. (a) Single crystal diamond with high purity; (b) single crystal diamond with low-doped nitrogen; (c) reference sample

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图 2. 高纯单晶金刚石、微掺氮单晶金刚石和参照样品的PL图。(a)高纯单晶金刚石;(b)微掺氮单晶金刚石;(c)参照样品

Fig. 2. PL diagram of three kinds of single crystal diamonds. (a) Single crystal diamond with high purity; (b) single crystal diamond with low-doped nitrogen; (c) reference sample

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图 3. 高纯单晶金刚石、微掺氮单晶金刚石和参照样品的正交偏光显微图(透射光)。(a)高纯单晶金刚石;(b)微掺氮单晶金刚石;(c)参照样品

Fig. 3. Cross polarized micrograph (transmitted light) of three kinds of single crystal diamonds. (a) Single crystal diamond with high purity; (b) single crystal diamond with low-doped nitrogen; (c) reference sample

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图 4. 高纯单晶金刚石、微掺氮单晶金刚石和参照样品的拉曼光谱图

Fig. 4. Raman spectra of single crystal diamond with high purity, single crystal diamond with low-doped nitrogen and reference sample

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图 5. 高纯单晶金刚石、微掺氮单晶金刚石和参照样品拟合后的Raman光谱图。(a)高纯单晶金刚石;(b)微掺氮单晶金刚石;(c)参照样品

Fig. 5. Fitted Raman spectra of three kinds of single crystal diamonds. (a) Single crystal diamond with high purity; (b) single crystal diamond with low-doped nitrogen; (c) reference sample

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图 6. 高纯单晶金刚石、微掺氮单晶金刚石和参照样品的摇摆曲线。(a)高纯单晶金刚石;(b)微掺氮单晶金刚石;(c)参照样品

Fig. 6. X-ray rocking curve of three kinds of single crystal diamonds. (a) Single crystal diamond with high purity; (b) single crystal diamond with low-doped nitrogen; (c) reference sample

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图 7. 高纯单晶金刚石、微掺氮单晶金刚石和参照样品的X射线白光形貌图。(a)高纯单晶金刚石;(b)微掺氮单晶金刚石;(c)参照样品

Fig. 7. X-ray white light topography of three kinds of single crystal diamonds. (a) Single crystal diamond with high purity; (b) single crystal diamond with low-doped nitrogen; (c) reference sample

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图 8. 高纯单晶金刚石、微掺氮单晶金刚石和参照样品的红外吸光度图

Fig. 8. Infrared absorbance diagram of single crystal diamond with high purity, single crystal diamond with low-doped nitrogen and reference sample

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图 9. 高纯单晶金刚石、微掺氮单晶金刚石和参照样品的UV-visible-IR透过率

Fig. 9. UV-visible-IR transmittance of single crystal diamond with high purity, single crystal diamond with low-doped nitrogen and reference sample

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表 1高纯与微掺氮单晶金刚石沉积工艺参数表

Table1. Deposition parameters of single crystal diamonds with high purity and low-doped nitrogen

Deposition parameter High-purity single crystal diamond Low-concentration nitrogen doped single crystal diamond Flow of etching gas H2 /sccm 300 300 Flow of etching gas O2 /sccm 3 3 Etching temperature /℃ 700±10 700±10 Etching time /h 1 1 Deposition temperature /℃ 750±5 780±5 Flow of CH4, H2, N2, O2 /sccm 15, 300, 0, 1.2 15, 300, 0.9, 0

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屠菊萍, 刘金龙, 邵思武, 朱肖华, 赵云, 陈良贤, 魏俊俊, 李成明. 高质量单晶金刚石的合成、结构与光学性能研究[J]. 光学学报, 2020, 40(6): 0631001. Juping Tu, Jinlong Liu, Siwu Shao, Xiaohua Zhu, Yun Zhao, Liangxian Chen, Junjun Wei, Chengming Li. Synthesis, Structure, and Optical Properties of a High-Quality Single-Crystal Diamond[J]. Acta Optica Sinica, 2020, 40(6): 0631001.