中国光学, 2019, 12 (2): 371, 网络出版: 2020-02-11
飞秒脉冲激光对硅基多层膜损伤特性
Femtosecond pulsed laser induced damage characteristics on Si-based multi-layer film
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郑长彬, 邵俊峰, 李雪雷, 王化龙, 王春锐, 陈飞, 王挺峰, 郭劲. 飞秒脉冲激光对硅基多层膜损伤特性[J]. 中国光学, 2019, 12(2): 371.
ZHENG Chang-bin, SHAO Jun-feng, LI Xue-lei, WANG Hua-long, WANG Chun-rui, CHEN Fei, WANG Ting-feng, GUO Jin. Femtosecond pulsed laser induced damage characteristics on Si-based multi-layer film[J]. Chinese Optics, 2019, 12(2): 371.
郑长彬, 邵俊峰, 李雪雷, 王化龙, 王春锐, 陈飞, 王挺峰, 郭劲. 飞秒脉冲激光对硅基多层膜损伤特性[J]. 中国光学, 2019, 12(2): 371. ZHENG Chang-bin, SHAO Jun-feng, LI Xue-lei, WANG Hua-long, WANG Chun-rui, CHEN Fei, WANG Ting-feng, GUO Jin. Femtosecond pulsed laser induced damage characteristics on Si-based multi-layer film[J]. Chinese Optics, 2019, 12(2): 371.
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