光学学报, 2010, 30 (2): 597, 网络出版: 2010-02-02   

红外短波/长波分色片的研究

Design and Fabrication of Short-Wave /Long-Wave Infrared Dichroic Beam Splitter
作者单位
浙江大学 现代光学仪器国家重点实验室,浙江 杭州 310027
摘要
短波红外/长波红外分色片在红外双波段成像光学系统中起着重要的作用。分析了分色片基板和薄膜材料的选择。选定硒化锌为基板,采用Ge,ZnSe和YbF3作为薄膜材料进行了优化设计,并对沉积温度和蒸发速率等工艺条件进行了优化,用电子束蒸发方法制备了该分色片,其反射率和透射率都达到了93%以上,已成功应用于实际光学系统中。
Abstract
Short-wave /long-wave infrared dichroic beam splitters take an important role in two-band infrared imaging optical systems. The choice of substrate and coating materials are discussed. Ge,ZnSe and YbF3 were chosen as film materials and ZnSe as substrate; The coating reflecting the shortwave infrared light while transmiting the longwave infrared (8-12 μm) light is analyzed,and the beam splitter is manufactured by electronic-beam evaporation. The measured reflectivity and transmittance of corresponding band are all above 93%. Such dichroic beam splitters have been successfully applied to the actual optical system.
参考文献

[1] 马晓燠,樊志华,饶长辉 等. 基于哈特曼波前传感器的非制冷红外成像光学读出系统[J]. 光学学报,2009,29(2):490-495

    Ma Xiaoyu,Fan Zhihua,Rao Changhui et al.. Application of Hartmann-Shack sensor in optical readout system of uncooled infrared imaging[J]. Acta Optica Sinica,2009,29(2):490-495

[2] 徐亮,张国玉,高玉军 等. 8倍非制冷型红外折/衍射连续变焦系统设计[J]. 光学学报,2009,29(2):478-481

    Xu Liang,Zhang Guoyu,Gao Yujun et al.. Design of 8× uncooled thermal infrared hybrid refractive-diffractive continuous-zoom lenses[J]. Acta Optica Sinica,2009,29(2):478-481

[3] 林炳,于天燕,刘定权 等. 红外/可见光宽带分色片设计与制备[J]. 红外与毫米波学报,2004,23(5):393-395

    Lin Bing,Yu Tianyan,Liu Dingquan et al.. Design and deposition of infrared/visible wideband color separation fiters[J]. J. Infrared and Millimeter Wave,2004,23(5):393-395

[4] . Lemarquis,G. Marchand,C. Amra. Design and manufacture of low-absorption ZnS-YF3 antireflection coatings in the 3.5-16 mm spectral range[J]. Appl. Opt., 1998, 37(19): 4239-4244.

[5] 于天燕,朱福荣,刘定权 等. 硫化锌透镜中长波红外宽带增透膜的研制[J]. 光学学报,2005,25(2):270-273

    Yu Tianyan,Zhu Furong,Liu Dingquan et al.. Design and deposition of broadband IR antireflection coatings on ZnS lenses[J]. Acta Optica Sinica,2005,25(2):270-273

[6] . F. Bezuidenhout,K. D. Clarke,R. Pretorius. The optical properties of YF3 films[J]. Thin Solid Films, 1987, 155: 17-30.

[7] . . Optical properties and residual stress of YbF3 thin films deposited at different temperatures[J]. Appl. Opt., 2008, 47(13): c319-c323.

[8] . . Infrared optical filters for the infrared atmospheric sounding interferometer meteorological space instrument[J]. Appl. Opt., 1999, 38(19): 4182-4188.

[9] . ferrante,Timothy W. Rand,Robert Cabrera et al.. Visible/long-wave infrared dichroic beamsplitter[J]. Opt. Engng., 2005, 44(6): 063801-4.

[10] 唐晋发,顾培夫[M].薄膜光学与技术. 北京:机械工业出版社,1989. 75-76

    Tang Jinfa,Gu Peifu. Optical Thin Film and Technology[M]. Beijing:China Machine Press,1989. 75-76

[11] . R. Dobler. Infrared coatings[J]. Appl. Opt., 1989, 28(14): 2698-2701.

[12] . Optical film material and their applications[J]. Appl. Opt., 1976, 15(10): 2318-2327.

章岳光, 王颖, 孙雪铮, 沈伟东, 刘旭, 顾培夫. 红外短波/长波分色片的研究[J]. 光学学报, 2010, 30(2): 597. Zhang Yueguang, Wang Ying, Sun Xuezheng, Shen Weidong, Liu Xu, Gu Peifu. Design and Fabrication of Short-Wave /Long-Wave Infrared Dichroic Beam Splitter[J]. Acta Optica Sinica, 2010, 30(2): 597.

本文已被 8 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!