点衍射干涉仪中小孔衍射波面误差分析
马强, 刘伟奇, 李香波, 康玉思, 魏忠伦, 冯睿, 柳华. 点衍射干涉仪中小孔衍射波面误差分析[J]. 光学学报, 2008, 28(12): 2321.
Ma Qiang, Liu Weiqi, Li Xiangbo, Kang Yusi, Wei Zhonglun, Feng Rui, Liu Hua. Analysis of Diffraction Wavefront Error in Point Diffraction Interferometer[J]. Acta Optica Sinica, 2008, 28(12): 2321.
[1] 刘国淦,张学军, 王权陡 等. 光纤点衍射干涉仪的技术研究[J]. 光学精密工程, 2001, 9(2): 142~145
Liu Guogan, Zhang Xuejun, Wang Quandou et al.. Fiber point diffraction interferometer[J]. Optics and Precision Engineering, 2001, 9(2): 142~145
[2] Patrick Naulleau, Kenneth A. Goldberg, Sang H. Lee et al.. The EUV phase-shifting point diffraction interferometer[C]. AIP Conf. Proc., 2000. 66~72
[3] Patrick Naulleau, Kenneth Goldberg, Sang Lee et al.. Characterization of the accuracy of EUV phase-shifting point diffraction interferometry[C]. Proc. SPIE, 1998, 3331: 114~123
[4] 朱向冰, 陈瑾, 邓善熙 等. 平面变线密度光栅的制作和波前检测[J]. 中国激光, 2006, 33(1): 72~75
[5] 邓小玖, 李怀龙, 刘彩霞 等. 矢量衍射理论的比较研究及标量近似的有效性[J]. 量子电子学报, 2007, 24(5): 543~547
[6] 周万治, 卢振武. 点衍射全息干涉仪[J]. 光学学报, 1986, 6(12): 1130~1135
[7] 叶一东, 李建民, 颜宏 等. 光束衍射传输的数值计算方法[J]. 中国激光, 2006, 33(suppl): 284~286
Ye Yidong, Li Jianmin, Yan Hong et al.. Numerical simulation for optical beam diffraction propagation[J]. Chin. J. Lasers, 2006, 33(suppl): 284~286
[8] K. Otaki, Y Zhu, M . Ishii et al.. Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL[C]. Proc. SPIE, 2004, 5193: 182~190
[9] 刘宏展, 徐荣伟, 刘立人 等. 圆孔受限波差高斯光束的远场近似及发散度分析[J]. 光学学报, 2006, 26(1): 131~135
[10] 张冬青, 王向朝, 施伟杰 等. 光刻机投影物镜的像差原位检测新技术[J]. 光学学报, 2006, 26(5): 679~684
[11] Kazuya Ota, Takahiro Yamamoto, Yusuke Fukuda et al.. Advanced point diffraction interferometer for EUV aspherical mirrors[C]. Proc. SPIE, 2001, 4343: 543~550
马强, 刘伟奇, 李香波, 康玉思, 魏忠伦, 冯睿, 柳华. 点衍射干涉仪中小孔衍射波面误差分析[J]. 光学学报, 2008, 28(12): 2321. Ma Qiang, Liu Weiqi, Li Xiangbo, Kang Yusi, Wei Zhonglun, Feng Rui, Liu Hua. Analysis of Diffraction Wavefront Error in Point Diffraction Interferometer[J]. Acta Optica Sinica, 2008, 28(12): 2321.