点衍射干涉仪中小孔衍射波面误差分析

马强; 刘伟奇; 李香波; 康玉思; 魏忠伦; 冯睿; 柳华

光学学报, 2008, 28 (12): 2321, 网络出版: 2008-12-17

点衍射干涉仪中小孔衍射波面误差分析

Analysis of Diffraction Wavefront Error in Point Diffraction Interferometer

论文大纲

马强 ^1,2,*刘伟奇 ¹李香波 ^1,2康玉思 ^1,2魏忠伦 ¹冯睿 ¹柳华 ¹

作者单位

¹ 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室, 吉林长春 130033

² 中国科学院研究生院, 北京 100039

光学检测点衍射干涉仪标量衍射衍射波面误差 optical testing point diffraction interferometer scalar diffraction diffraction wavefront error

摘要

针孔或光纤直径的大小是影响点衍射干涉仪检测精度的重要因素, 在实际检测中须根据检测任务的精度要求来选择小孔的尺寸。基于标量衍射理论, 仿真计算了小孔尺寸引起的衍射波面相对标准球面偏离的误差。结果表明, 当小孔直径为2.5 μm, 数值孔径(NA)为0.3时, 与小孔有关的光学系统误差峰值(PV)约为0.07 nm。仿真方法和计算结果为针对各种高精度面形检测任务而设计点衍射干涉仪和分析其精度提供了理论和数据参考。

Abstract

The diameter of pinhole or fiber is a critical element that affects the precision of point diffraction interferometer (PDI). The dimension of the aperture is determined by variational accuracy of practical measurement. Based on the scalar diffraction theory, the deviation between diffraction wavefront and sphericity aroused by the dimensions of the aperture is simulated and analyzed. The results show the wavefront error of the optical system is about 0.07 nm peak-vally value (PV) when the numerical aperture (NA) is 0.3 and the aperture diameter is 2.5 μm. The method and results of simulation analysis provide theory and data reference for choosing the dimension of aperture along with the analysis or design of PDI for various testing tasks of accuracy requirement.

参考文献

[1] 刘国淦,张学军, 王权陡等. 光纤点衍射干涉仪的技术研究[J]. 光学精密工程, 2001, 9(2): 142～145

Liu Guogan, Zhang Xuejun, Wang Quandou et al.. Fiber point diffraction interferometer[J]. Optics and Precision Engineering, 2001, 9(2): 142～145

[2] Patrick Naulleau, Kenneth A. Goldberg, Sang H. Lee et al.. The EUV phase-shifting point diffraction interferometer[C]. AIP Conf. Proc., 2000. 66～72

[3] Patrick Naulleau, Kenneth Goldberg, Sang Lee et al.. Characterization of the accuracy of EUV phase-shifting point diffraction interferometry[C]. Proc. SPIE, 1998, 3331: 114～123

[4] 朱向冰, 陈瑾, 邓善熙等. 平面变线密度光栅的制作和波前检测[J]. 中国激光, 2006, 33(1): 72～75

Zhu Xiangbing, Chen Jin, Deng Shanxi et al.. Fabrication of varied-line-space plane gratings and wave fronts inspection[J]. Chin. J. Lasers, 2006, 33(1): 72～75

[5] 邓小玖, 李怀龙, 刘彩霞等. 矢量衍射理论的比较研究及标量近似的有效性[J]. 量子电子学报, 2007, 24(5): 543～547

Deng Xiaojiu, Li Huailong, Liu Caixia et al.. A comparative study of vectorial difraction theories and the validity of scalar approximation[J]. Chin. J. Quant. Electron., 2007, 24(5): 543～547

[6] 周万治, 卢振武. 点衍射全息干涉仪[J]. 光学学报, 1986, 6(12): 1130～1135

Zhou Wanzhi, Lu Zhenwu. A point-diffraction holographic interferometer[J]. Acta Optica Sinica, 1986, 6(12): 1130～1135

[7] 叶一东, 李建民, 颜宏等. 光束衍射传输的数值计算方法[J]. 中国激光, 2006, 33(suppl): 284～286

Ye Yidong, Li Jianmin, Yan Hong et al.. Numerical simulation for optical beam diffraction propagation[J]. Chin. J. Lasers, 2006, 33(suppl): 284～286

[8] K. Otaki, Y Zhu, M . Ishii et al.. Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL[C]. Proc. SPIE, 2004, 5193: 182～190

[9] 刘宏展, 徐荣伟, 刘立人等. 圆孔受限波差高斯光束的远场近似及发散度分析[J]. 光学学报, 2006, 26(1): 131～135

Liu Hongzhan, Xu Rongwei, Liu Liren et al.. Far-field approximation and divergence of Gaussian beam with phase aberrations diffracted by a circular aperture[J]. Acta Optica Sinica, 2006, 26(1): 131～135

[10] 张冬青, 王向朝, 施伟杰等. 光刻机投影物镜的像差原位检测新技术[J]. 光学学报, 2006, 26(5): 679～684

Zhang Dongqing, Wang Xiangzhao, Shi Weijie et al.. New technique for aberration in-situ measurement of a lithographic projection system[J]. Acta Optica Sinica, 2006, 26(5): 679～684

[11] Kazuya Ota, Takahiro Yamamoto, Yusuke Fukuda et al.. Advanced point diffraction interferometer for EUV aspherical mirrors[C]. Proc. SPIE, 2001, 4343: 543～550

马强, 刘伟奇, 李香波, 康玉思, 魏忠伦, 冯睿, 柳华. 点衍射干涉仪中小孔衍射波面误差分析[J]. 光学学报, 2008, 28(12): 2321. Ma Qiang, Liu Weiqi, Li Xiangbo, Kang Yusi, Wei Zhonglun, Feng Rui, Liu Hua. Analysis of Diffraction Wavefront Error in Point Diffraction Interferometer[J]. Acta Optica Sinica, 2008, 28(12): 2321.

点衍射干涉仪中小孔衍射波面误差分析

关于本站 Cookie 的使用提示

全站搜索

点衍射干涉仪中小孔衍射波面误差分析

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索