Chinese Optics Letters, 2007, 5 (5): 301, Published Online: Jun. 27, 2007
Interface roughness, surface roughness and soft X-ray reflectivity of Mo/Si multilayers with different layer number
Mo/Si多层膜 软X射线反射率 表面粗糙度 界面粗糙度 膜层数 230.4170 Multilayers 310.1860 Deposition and fabrication 120.6660 Surface measurements, roughness 120.5700 Reflection 340.0340 X-ray optics
Abstract
A series of Mo/Si multilayers with the same periodic length and different periodic number were prepared by magnetron sputtering, whose top layers were respectively Mo layer and Si layer. Periodic length and interface roughness of Mo/Si multilayers were determined by small angle X-ray diffraction (SAXRD). Surface roughness change curve of Mo/Si multilayer with increasing layer number was studied by atomic force microscope (AFM). Soft X-ray reflectivity of Mo/Si multilayers was measured in National Synchrotron Radiation Laboratory (NSRL). Theoretical and experimental results show that the soft X-ray reflectivity of Mo/Si multilayer is mainly determined by periodic number and interface roughness, surface roughness has little effect on reflectivity.
Junling Qin, Jianda Shao, Kui Yi, Zhengxiu Fan. Interface roughness, surface roughness and soft X-ray reflectivity of Mo/Si multilayers with different layer number[J]. Chinese Optics Letters, 2007, 5(5): 301.