Author Affiliations
Abstract
1 Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
2 Graduate School of the Chinese Academy of Sciences, Beijing 100039
A series of Mo/Si multilayers with the same periodic length and different periodic number were prepared by magnetron sputtering, whose top layers were respectively Mo layer and Si layer. Periodic length and interface roughness of Mo/Si multilayers were determined by small angle X-ray diffraction (SAXRD). Surface roughness change curve of Mo/Si multilayer with increasing layer number was studied by atomic force microscope (AFM). Soft X-ray reflectivity of Mo/Si multilayers was measured in National Synchrotron Radiation Laboratory (NSRL). Theoretical and experimental results show that the soft X-ray reflectivity of Mo/Si multilayer is mainly determined by periodic number and interface roughness, surface roughness has little effect on reflectivity.
Mo/Si多层膜 软X射线反射率 表面粗糙度 界面粗糙度 膜层数 230.4170 Multilayers 310.1860 Deposition and fabrication 120.6660 Surface measurements, roughness 120.5700 Reflection 340.0340 X-ray optics Chinese Optics Letters
2007, 5(5): 301