基于软光刻的多层光互连垂直耦合结构
刘彦婷, 倪玮, 吴兴坤. 基于软光刻的多层光互连垂直耦合结构[J]. 光学学报, 2008, 28(2): 349.
Liu Yanting, Ni Wei, Wu Xingkun. A Soft-Lithography-Based Vertically Coupling Structure for Multilayered Optical Interconnection[J]. Acta Optica Sinica, 2008, 28(2): 349.
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刘彦婷, 倪玮, 吴兴坤. 基于软光刻的多层光互连垂直耦合结构[J]. 光学学报, 2008, 28(2): 349. Liu Yanting, Ni Wei, Wu Xingkun. A Soft-Lithography-Based Vertically Coupling Structure for Multilayered Optical Interconnection[J]. Acta Optica Sinica, 2008, 28(2): 349.