基于硅微加工技术的新型变形反射镜
余洪斌, 陈海清, 张大成, 竺子民, 李婷. 基于硅微加工技术的新型变形反射镜[J]. 强激光与粒子束, 2004, 16(7): 825.
YU Hong-bin, CHEN Hai-qing, ZHANG Da-cheng, ZHU Zi-min, LI Ting. Novel deformable mirror based on silicon micromachining technology[J]. High Power Laser and Particle Beams, 2004, 16(7): 825.
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余洪斌, 陈海清, 张大成, 竺子民, 李婷. 基于硅微加工技术的新型变形反射镜[J]. 强激光与粒子束, 2004, 16(7): 825. YU Hong-bin, CHEN Hai-qing, ZHANG Da-cheng, ZHU Zi-min, LI Ting. Novel deformable mirror based on silicon micromachining technology[J]. High Power Laser and Particle Beams, 2004, 16(7): 825.