激光技术, 2004, 28 (2): 137, 网络出版: 2007-09-18
射频CO2激光陶瓷基板划片机光路设计及分析
The design of beam delivery system of RF CO2 laser ceramic substrate scriber
补充材料
侯廉平, 陈培峰, 王圩, 朱洪亮. 射频CO2激光陶瓷基板划片机光路设计及分析[J]. 激光技术, 2004, 28(2): 137. 侯廉平, 陈培峰, 王圩, 朱洪亮. The design of beam delivery system of RF CO2 laser ceramic substrate scriber[J]. Laser Technology, 2004, 28(2): 137.