Photonics Research, 2021, 9 (1): 01000013, Published Online: Dec. 15, 2020   

Metasurface-based subtractive color filter fabricated on a 12-inch glass wafer using a CMOS platform Download: 878次Cover paper

Author Affiliations
1 Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore 138634, Singapore
2 Current Address: School of Microelectronics Science and Technology, Sun Yat-sen University, Zhuhai 519082, China
Basic Information
DOI: 10.1364/PRJ.404124
中图分类号: --
栏目: Integrated Optics
项目基金: Agency for Science, Technology and Research10.13039/501100001348(RIE2020 Advanced Manufacturing and Engineering (AME))、 Programmatic Grant (A18A7b0058)
收稿日期: Jul. 31, 2020
修改稿日期: Sep. 23, 2020
网络出版日期: Dec. 15, 2020
通讯作者: Nanxi Li (linx1@ime.a-star.edu.sg)
备注: --

Zhengji Xu, Nanxi Li, Yuan Dong, Yuan Hsing Fu, Ting Hu, Qize Zhong, Yanyan Zhou, Dongdong Li, Shiyang Zhu, Navab Singh. Metasurface-based subtractive color filter fabricated on a 12-inch glass wafer using a CMOS platform[J]. Photonics Research, 2021, 9(1): 01000013.

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