Metasurface-based subtractive color filter fabricated on a 12-inch glass wafer using a CMOS platform

Zhengji Xu; Nanxi Li; Yuan Dong; Yuan Hsing Fu; Ting Hu; Qize Zhong; Yanyan Zhou; Dongdong Li; Shiyang Zhu; Navab Singh

doi:doi:10.1364/PRJ.404124

Photonics Research, 2021, 9 (1): 01000013, Published Online: Dec. 15, 2020

Metasurface-based subtractive color filter fabricated on a 12-inch glass wafer using a CMOS platform Download： 879次Cover paper

Zhengji Xu ^1,2Nanxi Li ^1,*Yuan Dong ¹Yuan Hsing Fu ¹Ting Hu ¹Qize Zhong ¹Yanyan Zhou ¹Dongdong Li ¹Shiyang Zhu ¹Navab Singh ¹

Author Affiliations

¹ Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore 138634, Singapore

² Current Address: School of Microelectronics Science and Technology, Sun Yat-sen University, Zhuhai 519082, China

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Zhengji Xu, Nanxi Li, Yuan Dong, Yuan Hsing Fu, Ting Hu, Qize Zhong, Yanyan Zhou, Dongdong Li, Shiyang Zhu, Navab Singh. Metasurface-based subtractive color filter fabricated on a 12-inch glass wafer using a CMOS platform[J]. Photonics Research, 2021, 9(1): 01000013.