碳污染清洗工艺对极紫外光刻光学元件反射率的影响
王依, 卢启鹏, 高云国. 碳污染清洗工艺对极紫外光刻光学元件反射率的影响[J]. 中国激光, 2017, 44(3): 0303004.
Wang Yi, Lu Qipeng, Gao Yunguo. Impact of Carbon Contamination Cleaning Technologies on Reflectivity of Extreme Ultraviolet Lithography Optics[J]. Chinese Journal of Lasers, 2017, 44(3): 0303004.
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王依, 卢启鹏, 高云国. 碳污染清洗工艺对极紫外光刻光学元件反射率的影响[J]. 中国激光, 2017, 44(3): 0303004. Wang Yi, Lu Qipeng, Gao Yunguo. Impact of Carbon Contamination Cleaning Technologies on Reflectivity of Extreme Ultraviolet Lithography Optics[J]. Chinese Journal of Lasers, 2017, 44(3): 0303004.