光学学报, 2008, 28 (11): 2220, 网络出版: 2008-11-17   

微型可编程光栅最大闪耀角的理论分析与实验

Theoretical Analysis and Experimental Measurement on the Maximum Blazing Angle for Microprogrammable Gratings
作者单位
西北工业大学微/纳米系统实验室, 陕西 西安 710072
摘要
在微机电系统技术的基础上, 采用两层多晶硅表面微加工工艺, 设计并加工制作了一种闪耀角可调式的微型可编程光栅。介绍了微型可编程光栅的基本工作原理及结构设计特点, 针对其最主要的一个光学参量——最大闪耀角, 根据设计的光栅结构尺寸进行了理论计算, 并利用ANSYS有限元仿真结合Matlab软件的数据处理功能进行了数值模拟。设计并搭建了一个简单易操作的光学实验系统, 对最大闪耀角进行了实际测量。结果表明, 理论计算、数值模拟以及实际测量的最大闪耀角非常吻合, 制作的微型可编程光栅的最大闪耀角超过5°。
Abstract
Based on the microelectromechanical systems (MEMS) technology, a new microprogrammable grating with tunable blazing angle was designed and fabricated by using the two-layer polysilicon surface micromachining process. The basic operational principle and structural characterizations fabricated grating were briefly introduced and then the maximum blazing angle, the most important optical parameter, was theoretically computed according to the designed structural dimensions and numerically simulated by combining the finite element simulation tool of ANSYS with Matlab's data processing functionality. A simple but efficient optical system was set up for measuring the maximum blazing angle. The results from simulation, calculation and experiments agree very well with each other. The maximum blazing angle of the fabricated micro programmable grating is larger than 5°.
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虞益挺, 苑伟政, 王兰兰, 乔大勇, 梁庆. 微型可编程光栅最大闪耀角的理论分析与实验[J]. 光学学报, 2008, 28(11): 2220. Yu Yiting, Yuan Weizheng, Wang Lanlan, Qiao Dayong, Liang Qing. Theoretical Analysis and Experimental Measurement on the Maximum Blazing Angle for Microprogrammable Gratings[J]. Acta Optica Sinica, 2008, 28(11): 2220.

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