光学 精密工程, 2013, 21 (9): 2244, 网络出版: 2013-09-25
数字横向剪切干涉仪相移技术
Phase-shifting technology of digital lateral shearing interferometer
引用该论文
何煦, 向阳. 数字横向剪切干涉仪相移技术[J]. 光学 精密工程, 2013, 21(9): 2244.
HE Xu, XIANG Yang. Phase-shifting technology of digital lateral shearing interferometer[J]. Optics and Precision Engineering, 2013, 21(9): 2244.
何煦, 向阳. 数字横向剪切干涉仪相移技术[J]. 光学 精密工程, 2013, 21(9): 2244. HE Xu, XIANG Yang. Phase-shifting technology of digital lateral shearing interferometer[J]. Optics and Precision Engineering, 2013, 21(9): 2244.